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Year of Publication 03.07.1986
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Year of Publication 03.07.1986
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KANANO OSAMU, KANBARA SHOZO, MIYAZAKI HIDEO, YASUOKA AKIO, MORI NOBUYUKI, KUROKI MASAMI
Year of Publication 03.07.1986
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Year of Publication 03.07.1986
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High-purity molybdenum target and high-purity molybdenum silicide target for LSI electrodes and process for producing the same
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Year of Publication 17.04.1985
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Year of Publication 17.04.1985
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DE4004575
NISHIMURA, EIJI, SAITAMA, JP, SHINDOU, YUUICHIRO, URAWA, SAITAMA, JP, KIKUTAKE, NAOYUKI, TAMA, TOKIO/TOKYO, JP, KUROKI, MASAMI, URAWA, SAITAMA, JP
Year of Publication 19.03.1992
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Year of Publication 19.03.1992
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High purity titanium used as cathodic sputtering target - in molten salt electrolytic cell, with parts contacting electrolyte made of nickel to avoid titanium contamination
NISHIMURA, EIJI, SAITAMA, JP, SHINDOU, YUUICHIRO, URAWA, SAITAMA, JP, KIKUTAKE, NAOYUKI, TAMA, TOKIO/TOKYO, JP, KUROKI, MASAMI, URAWA, SAITAMA, JP
Year of Publication 16.08.1990
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Year of Publication 16.08.1990
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