Removal and characterization of focused-ion-beam-induced damaged layer on single crystal diamond surface and application to multiple depth patterning
Kawasegi, Noritaka, Kuroda, Seiya, Morita, Noboru, Nishimura, Kazuhito, Yamaguchi, Makoto, Takano, Noboru
Published in Diamond and related materials (01.11.2016)
Published in Diamond and related materials (01.11.2016)
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