Enhancement of Diffraction-Based Overlay Model for Overlay Target With Asymmetric Sidewall
Su, Chun-Han, Lin, Zi-Han, Lin, Yu-Shin, Kuo, Hung-Fei
Published in IEEE transactions on semiconductor manufacturing (01.08.2020)
Published in IEEE transactions on semiconductor manufacturing (01.08.2020)
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Journal Article
Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm
Kan, Wei-Ming, Huang, Yu-Ru, Huang, Chao-Yi, Wu, Chun-Sheng, Chen, Kao-Tun, Lin, Yu-Shin, Kuo, Hung-Fei
Published in IEEE access (2019)
Published in IEEE access (2019)
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Journal Article
Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System
Lie, Frederick, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, Hung-Fei Kuo
Published in IEEE access (2017)
Published in IEEE access (2017)
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Journal Article
Impact of source pupil shapes on process windows in EUV lithography
Kuo, Hung-Fei
Published in 2013 IEEE 5th International Nanoelectronics Conference (INEC) (01.01.2013)
Published in 2013 IEEE 5th International Nanoelectronics Conference (INEC) (01.01.2013)
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Conference Proceeding
Journal Article
Surface-enhanced Raman scattering substrates of flat and wrinkly titanium nitride thin films by sputter deposition
Kaisar, Nahid, Huang, Yu-Ting, Jou, Shyankay, Kuo, Hung-Fei, Huang, Bohr-Ran, Chen, Chung-Chi, Hsieh, Yi-Fang, Chung, Yueh-Ching
Published in Surface & coatings technology (15.03.2018)
Published in Surface & coatings technology (15.03.2018)
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Journal Article
Hybrid Integration of End-to-End Optical Interconnects on Printed Circuit Boards
Zhaoran Rena Huang, Guidotti, D., Lixi Wan, Yin-Jung Chang, Jianjun Yu, Jin Liu, Hung-Fei Kuo, Gee-Kung Chang, Fuhan Liu, Tummala, R.R.
Published in IEEE transactions on components and packaging technologies (01.12.2007)
Published in IEEE transactions on components and packaging technologies (01.12.2007)
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Journal Article
Deep Learning-Based Framework for Comprehensive Mask Optimization
Yu, Bo-Yi, Zhong, Yong, Fang, Shao-Yun, Kuo, Hung-Fei
Published in 2019 24th Asia and South Pacific Design Automation Conference (ASP-DAC) (21.01.2019)
Published in 2019 24th Asia and South Pacific Design Automation Conference (ASP-DAC) (21.01.2019)
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Conference Proceeding
Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry
Li, Jinyang, Kuo, Hung-Fei
Published in IEEE transactions on semiconductor manufacturing (22.08.2024)
Published in IEEE transactions on semiconductor manufacturing (22.08.2024)
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Journal Article