New Evaluation Approach of Alignment Signal from Resist-Coated Patterns
Kuniyoshi, Shinji, Fujimoto, Kooji, Kimura, Takeshi
Published in Japanese Journal of Applied Physics (01.10.1989)
Published in Japanese Journal of Applied Physics (01.10.1989)
Get full text
Journal Article
High-quality carbon-doped boron nitride membrane for X-ray lithography mask
KISHIMOTO, A, SAKAKIHARA, M, KAWAI, T, OIZUMI, H, KUNIYOSHI, S, YAMAGUCHI, S, MOCHIJI, K
Published in Japanese Journal of Applied Physics (01.06.1992)
Published in Japanese Journal of Applied Physics (01.06.1992)
Get full text
Journal Article
Minimization of X-ray mask distortion by two-dimensional finite element method simulation
KISHIMOTO, A, KUNIYOSHI, S, SAITO, N, SOGA, T, MOCHIJI, K, KIMURA, T
Published in Japanese Journal of Applied Physics (01.10.1990)
Published in Japanese Journal of Applied Physics (01.10.1990)
Get full text
Journal Article
PROBE FOR ENERGIZATION TEST
KUNIYOSHI, SHINJI, SOMA, AKIRA, HAYASHIZAKI, TAKAYUKI, TAZAWA, MASAHISA, HIRAKAWA, HIDEKI
Year of Publication 15.02.2007
Get full text
Year of Publication 15.02.2007
Patent
PROBE ASSEMBLY, METHOD OF PRODUCING THE PROBE ASSEMBLY, AND ELECTRICAL CONNECTION DEVICE
MIURA, KIYOTOSHI, KUNIYOSHI, SHINJI, KIYOFUJI, HIDEHIRO, SATO, HITOSHI, MIYAGI, YUJI
Year of Publication 30.11.2006
Get full text
Year of Publication 30.11.2006
Patent
PROBE FOR ENERGIZATION TEST AND ELECTRIC CONNECTION DEVICE USING THE SAME
KUNIYOSHI, SHINJI, SOMA, AKIRA, HAYASHIZAKI, TAKAYUKI, HIRAKAWA, HIDEKI
Year of Publication 14.09.2006
Get full text
Year of Publication 14.09.2006
Patent
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURING METHOD
TADOKORO MASAHIRO, YAMAZAKI KAZUO, KUSAKARI KOUSUKE, KUNIYOSHI SHINJI, IKEDA TAKENOBU
Year of Publication 03.11.2001
Get full text
Year of Publication 03.11.2001
Patent
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
KUNIYOSHI, SHINJI, KOMORIYA, SUSUMU, NAGATSUKA, SHUNJI, MAEJIMA, HISASHI, IRIKI, NOBUYUKI, HIRANUMA, MASAYUKI, HIROI, TAKASHI, KATO, TAKESHI
Year of Publication 31.10.1996
Get full text
Year of Publication 31.10.1996
Patent
Elektrische Prüfsonde
Soma, Akira, Hayashizaki, Takayuki, Kuniyoshi, Shinji, Tazawa, Masahisa, Hirakawa, Hideki
Year of Publication 15.11.2018
Get full text
Year of Publication 15.11.2018
Patent