A consideration for electrical activation of carbon implanted into gallium arsenide
Yokota, Katsuhiro, Emi, Naoto, Sakaguchi, Masanori, Sunairi, Shuuji, Watanabe, Masanori, Takagi, Toshinori, Hirai, Kiyohito, Takano, Hiromichi, Kumagai, Masao
Published in Materials chemistry and physics (01.07.1998)
Published in Materials chemistry and physics (01.07.1998)
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Journal Article
Conference Proceeding
Redistribution of implanted impurities in dual As + and B + implanted silicon during annealing
Yokota, Katsuhiro, Nakamura, Takafumi, Kitagawa, Takaei, Miyashita, Fumiyoshi, Hirai, Kiyoto, Takano, Hiromichi, Kumagai, Masao
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1997)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.1997)
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Journal Article