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KULSHRESHTHA PRASHANT KUMAR, NARAYANAN RAJARAM, RUAN FANG, KEDLAYA DIWAKAR
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
KULSHRESHTHA PRASHANT KUMAR, NARASIMHA KARTHIK THIMMAVAJJULA, LEE KWANGDUK DOUGLAS, DUAN ZIQING, KIM BOK HOEN
Year of Publication 13.05.2024
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Year of Publication 13.05.2024
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프로세스 드리프트를 제어하기 위한 프로세싱 시스템들 및 방법들
KULSHRESHTHA PRASHANT KUMAR, RUAN FANG, KEDLAYA DIWAKAR, CHUA VIVIEN, JIANG ZHIJUN
Year of Publication 23.02.2024
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Year of Publication 23.02.2024
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DEPOSITION OF METAL SILICIDE LAYERS ON SUBSTRATES AND CHAMBER COMPONENTS
KULSHRESHTHA PRASHANT KUMAR, GADRE MILIND, MIN XIAOQUAN, LEE KWANGDUK DOUGLAS, WANG JIARUI, CONNORS PAUL
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
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질소 도핑된 탄소 하드마스크 막들
MIN XIAOQUAN, KULSHRESHTHA PRASHANT KUMAR, XU LU, LEE KWANGDUK DOUGLAS
Year of Publication 06.01.2023
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Year of Publication 06.01.2023
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감소된 수소 증착 프로세스들
MIN XIAOQUAN, KULSHRESHTHA PRASHANT KUMAR, LEE KWANGDUK, PARIMI VENKATA SHARAT CHANDRA
Year of Publication 12.07.2022
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Year of Publication 12.07.2022
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기판 후면 손상을 최소화하기 위한 방법들 및 장치
BOBEK SARAH MICHELLE, KULSHRESHTHA PRASHANT KUMAR, KHAJA ABDUL AZIZ, HU LIANGFA, SUZUKI YOICHI
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
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HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
KULSHRESHTHA PRASHANT KUMAR, LEE KWANGDUK DOUGLAS, OSHIO HIDETAKA, WHITESELL HARRY, LEE DONG HYUNG, PRASAD RAJESH, BOBEK SARAH, MITTAL DEVEN MATTHEW RAJ
Year of Publication 15.12.2023
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Year of Publication 15.12.2023
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타깃팅된 열 제어 시스템들
BOBEK SARAH MICHELLE, MIN XIAOQUAN, KULSHRESHTHA PRASHANT KUMAR, PRABHAKAR VINAY, PARIMI VENKATA SHARAT CHANDRA, RADHAKRISHNAN SATISH, HA SUNGWON
Year of Publication 02.09.2022
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Year of Publication 02.09.2022
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척킹 및 아크 발생 성능이 개선된 정전 척 설계
BOBEK SARAH MICHELLE, KULSHRESHTHA PRASHANT KUMAR, KHAJA ABDUL AZIZ, PARIMI VENKATA SHARAT CHANDRA, PRABHAKAR VINAY K
Year of Publication 14.07.2021
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Year of Publication 14.07.2021
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프로세스 챔버 컴포넌트 세정 방법
KULSHRESHTHA PRASHANT KUMAR, LEE KWANGDUK DOUGLAS, BOBEK SARAH, KWON BYUNG SEOK
Year of Publication 16.06.2021
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Year of Publication 16.06.2021
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고 에칭 선택성 비정질 탄소 막
KULSHRESHTHA PRASHANT KUMAR, LEE KWANGDUK DOUGLAS, OSHIO HIDETAKA, WHITESELL HARRY, LEE DONG HYUNG, PRASAD RAJESH, BOBEK SARAH, CHAVVA VENKATARAMANA R, FALK SCOTT, RAJ MITTAL DEVEN MATTHEW
Year of Publication 31.03.2023
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Year of Publication 31.03.2023
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프로세스 챔버를 세정하기 위한 방법
KULSHRESHTHA PRASHANT KUMAR, XU LU, LEE KWANGDUK DOUGLAS, LEE DONG HYUNG, KWON BYUNG SEOK, LEE SEOYOUNG
Year of Publication 27.09.2021
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Year of Publication 27.09.2021
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디바이스 제작에서의 금속 하드마스크 형성 시스템들 및 방법들
MIN XIAOQUAN, KULSHRESHTHA PRASHANT KUMAR, LEE KWANGDUK DOUGLAS, PRABHAKAR VINAY K
Year of Publication 13.10.2020
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Year of Publication 13.10.2020
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감소된 결함의 증착 프로세스들
MIN XIAOQUAN, KULSHRESHTHA PRASHANT KUMAR, WOO HYUNG JE, LEE KWANGDUK, PARIMI VENKATA SHARAT CHANDRA, SONG BYUNG IK
Year of Publication 01.07.2022
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Year of Publication 01.07.2022
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CVD GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
KULSHRESHTHA PRASHANT KUMAR, PANDIT MANDAR B, LEE KWANGDUK DOUGLAS, JING LEI, RATHI SUDHA, DUAN ZIQING, BALASUBRAMANIAN GANESH, SEAMONS MARTIN J, KIM BOK HOEN, BASU SAPTARSHI, JHA PRAKET P
Year of Publication 27.05.2022
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Year of Publication 27.05.2022
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HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT ENGINEERED IN-SITU CHARGE TRAP MATERIALS
BEHERA SWAYAMBHU PRASAD, KULSHRESHTHA PRASHANT KUMAR, ROCHA ALVAREZ JUAN CARLOS, LEE KWANGDUK DOUGLAS, CHEN JIAN J, BALASUBRAMANIAN GANESH, KIM BOK HOEN, YE ZHENG JOHN
Year of Publication 03.05.2022
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Year of Publication 03.05.2022
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CVD GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
KULSHRESHTHA PRASHANT KUMAR, PANDIT MANDAR B, LEE KWANGDUK DOUGLAS, JING LEI, RATHI SUDHA, DUAN ZIQING, BALASUBRAMANIAN GANESH, SEAMONS MARTIN J, KIM BOK HOEN, BASU SAPTARSHI, JHA PRAKET P
Year of Publication 02.12.2021
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Year of Publication 02.12.2021
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