미세 기계식 회전비 센서 배열체, 회전비 센서 어레이 및 상응하는 제조 방법
PRUETZ ODD AXEL, KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, DEGENFELD SCHONBURG PETER, BODE NIELS, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 21.10.2022
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Year of Publication 21.10.2022
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주 연장 평면을 갖는 기판을 포함한 요레이트 센서, 그리고 요레이트 센서를 위한 제조 방법
KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, DEGENFELD SCHONBURG PETER, BODE NIELS, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 06.07.2020
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Year of Publication 06.07.2020
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선형 및 회전 구동형 센서 장치들을 구비한 3축 마이크로기계식 요레이트 센서 어셈블리
PRUETZ ODD AXEL, KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, DEGENFELD SCHONBURG PETER, BODE NIELS, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 08.05.2020
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Year of Publication 08.05.2020
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요 레이트 센서, 요 레이트 센서를 제조하기 위한 방법
PRUETZ ODD AXEL, KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, BODE NIELS, DEGENFELD SCHONBURG PETER, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 03.04.2020
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Year of Publication 03.04.2020
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Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method
Liewald, Jan-Timo, Neul, Reinhard, Kuhlmann, Burkhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 09.04.2024
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Year of Publication 09.04.2024
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Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Degenfeld-Schonburg, Peter
Year of Publication 23.08.2022
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Year of Publication 23.08.2022
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CAPTEUR DE VITESSE DE ROTATION COMPORTANT UN SUBSTRAT AVEC UN PLAN PRINCIPAL D'EXTENSION AINSI QU'UN PROCEDE DE FABRICATION D'UN CAPTEUR DE VITESSE DE ROTATION
DEGENFELD-SCHONBURG, PETER, KUHLMANN, NILS FELIX, KUEHBEL, MATTHIAS, NEUL, REINHARD, KUHLMANN, BURKHARD, LASSL, ANDREAS, BODE, NIELS, LIEWALD, JAN-TIMO
Year of Publication 05.08.2022
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Year of Publication 05.08.2022
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One-axis and two-axis rotation rate sensor
Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Bode, Niels, Degenfeld-Schonburg, Peter
Year of Publication 24.08.2021
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Year of Publication 24.08.2021
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MICROMECHANICAL RATE-OF-ROTATION SENSOR SET-UP, RATE-OF-ROTATION SENSOR ARRAY AND CORRESPONDING MANUFACTURING METHOD
Liewald, Jan-Timo, Neul, Reinhard, Kuhlmann, Burkhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
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ONE-AXIS AND TWO-AXIS ROTATION RATE SENSOR
Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Bode, Niels, Degenfeld-Schonburg, Peter
Year of Publication 26.11.2020
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Year of Publication 26.11.2020
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THREE AXIS MICROMECHANICAL ROTATIONAL RATE SENSOR ARRANGEMENT WITH LINEARLY AND ROTATIONALLY DRIVABLE SENSOR DEVICES
NEUL, Reinhard, KUHLMANN, Burkhard, BODE, Niels, KUEHNEL, Matthias, LASSL, Andreas, PRUETZ, Odd-Axel, KUHLMANN, Nils Felix, DEGENFELD-SCHONBURG, Peter, LIEWALD, Jan-Timo
Year of Publication 01.06.2022
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Year of Publication 01.06.2022
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