The thermal conductivity of polymethylsilsesquioxane aerogels and xerogels with varied pore sizes for practical application as thermal superinsulators
Hayase, G., Kugimiya, K., Ogawa, M., Kodera, Y., Kanamori, K., Nakanishi, K.
Published in Journal of materials chemistry. A, Materials for energy and sustainability (01.01.2014)
Published in Journal of materials chemistry. A, Materials for energy and sustainability (01.01.2014)
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Journal Article
On-wafer monitoring and control of ion energy distribution for damage minimization in atomic layer etching processes
Hirata, A., Fukasawa, M., Kugimiya, K., Nagaoka, K., Karahashi, K., Hamaguchi, S., Iwamoto, H.
Published in Japanese Journal of Applied Physics (01.06.2020)
Published in Japanese Journal of Applied Physics (01.06.2020)
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Journal Article
Diffusion mechanism of fluorine in plasma processing of III-V semiconductor compounds
Kodama, Y., Zaizen, Y., Minari, H., Cho, Y., Fukasawa, M., Kugimiya, K., Nagaoka, K., Iwamoto, H.
Published in Japanese Journal of Applied Physics (01.06.2020)
Published in Japanese Journal of Applied Physics (01.06.2020)
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Journal Article
Improvement in gate LWR with plasma curing of ArF photoresists
Ando, A., Matsui, E., Matsuzawa, N.N., Yamaguchi, Y., Kugimiya, K., Yoshida, M., Salam, K.M.A., Kusakabe, T., Tatsumi, T.
Published in Thin solid films (23.04.2007)
Published in Thin solid films (23.04.2007)
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Journal Article
Conference Proceeding
Low loss MnZn-ferrites: frequency dependence of minimum power loss temperature
Inoue, O., Matsutani, N., Kugimiya, K.
Published in IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) (01.11.1993)
Published in IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) (01.11.1993)
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Journal Article
Conference Proceeding
“Makyoh”: The 2000 year old technology still alive
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Journal Article
Conference Proceeding
Characterization of polished surfaces by “Makyoh”
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Journal Article
Conference Proceeding
Characterization of mirror-like wafer surfaces using the magic mirror method
Hahn, S., Kugimiya, K., Yamashita, M., Blaustein, P.R., Takahashi, K.
Published in Journal of crystal growth (01.06.1990)
Published in Journal of crystal growth (01.06.1990)
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Journal Article
Conference Proceeding
Development of Mitsubishi-planar reversible cell—Fundamental test on hydrogen-utilized electric power storage system
Kusunoki, D., Kikuoka, Y., Yanagi, V., Kugimiya, K., Yoshino, M., Tokura, M., Watanabe, K., Miyamoto, H., Ueda, S., Sumi, M., Tokunaga, S.
Published in International journal of hydrogen energy (1995)
Published in International journal of hydrogen energy (1995)
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Journal Article
High B / μ MnZn ferrites for high Hc media
Kugimiya, K., Hirota, K., Satomi, M.
Published in Journal of magnetism and magnetic materials (01.04.1988)
Published in Journal of magnetism and magnetic materials (01.04.1988)
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Journal Article
A new MoSi2/Thin poly-Si gate process technology without dielectric degradation of a gate oxide
Fukumoto, M., Shinohara, A., Okada, S., Kugimiya, K.
Published in IEEE transactions on electron devices (01.10.1984)
Published in IEEE transactions on electron devices (01.10.1984)
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Journal Article
Investigation of rapid-thermal-processing-induced defects in ion-implanted Czochralski silicon by the magic mirror method
Hahn, S, Kugimiya, K, Yarling, C B, Suga, H, Smith, W L, Blaustein, P R, Takahashi, K
Published in Semiconductor science and technology (01.01.1992)
Published in Semiconductor science and technology (01.01.1992)
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