New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM
Kuesters, Karl Heinz, Beug, Marc Florian, Schroeder, Uwe, Nagel, Nicolas, Bewersdorff, Ulrike, Dallmann, Gerald, Jakschik, Stefan, Knoefler, Roman, Kudelka, Stephan, Ludwig, Christoph, Manger, Dirk, Mueller, Wolfgang, Tilke, Armin
Published in Advanced engineering materials (01.04.2009)
Published in Advanced engineering materials (01.04.2009)
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Journal Article
Tuning the dielectric properties of hafnium silicate films
Fachmann, Christian, Frey, Lothar, Kudelka, Stephan, Boescke, Tim, Nawka, Stefan, Erben, Elke, Doll, Theodor
Published in Microelectronic engineering (01.12.2007)
Published in Microelectronic engineering (01.12.2007)
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Journal Article
New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM
Kuesters, Karl Heinz, Beug, Marc Florian, Schroeder, Uwe, Nagel, Nicolas, Bewersdorff, Ulrike, Dallmann, Gerald, Jakschik, Stefan, Knoefler, Roman, Kudelka, Stephan, Ludwig, Christoph, Manger, Dirk, Mueller, Wolfgang, Tilke, Armin
Published in Advanced engineering materials (01.06.2009)
Published in Advanced engineering materials (01.06.2009)
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Journal Article
STRUCTURE AND METHOD OF INCREASING STORAGE CAPACITANCE IN SEMICONDUCTOR WAFER
TEWS HELMUT, KUDELKA STEPHAN, BIRNER ALBERT, WEIS ROLF, LUETZEN JOERN
Year of Publication 09.06.2004
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Year of Publication 09.06.2004
Patent
Compatibility of High K Dielectric with TiCl4 Based TiN for MIS Storage Capacitors for sub 70 nm DT DRAM Technology and Beyond
Gay, Xavier, Hintze, Bernd, Erben, Elke, Bernhardt, Henry, Kudelka, Stephan P., Goupil, Christophe, Mercey, Bernhard
Published in ECS transactions (07.07.2006)
Published in ECS transactions (07.07.2006)
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Journal Article
Influence of Process Parameters on Leakage Current of Metal-Organic based HfSiOx Dielectrics
Avellan, Alejandro, Patz, Matthias, Erben, Elke, Ivanov, Alexey, Kudelka, Stephan
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
Recent Developments in ALD Technology for 50 nm Trench DRAM Applications
Schroeder, Uwe, Jakschik, Stefan, Erben, Elke, Avellan, Alejandro, Kudelka, Stephan P., Kerber, Martin, Link, Angela, Kersch, Alfred
Published in ECS transactions (07.07.2006)
Published in ECS transactions (07.07.2006)
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Journal Article
METHOD OF MANUFACTURING TRENCH CAPACITOR WITH INSULATING COLLAR CONNECTED ELECTRICALLY TO SUBSTRATE VIA BURIED CONTACT, ESPECIALLY SEMICONDUCTOR MEMORY CELL
HEINECK LARS, KUDELKA STEPHAN, POPP MARTIN, LUTZEN JORN, MOLL HANS PETER, SCHLOESSER TILL, STEINMETZ JOHANN
Year of Publication 09.06.2004
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Year of Publication 09.06.2004
Patent
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH TRENCH FOR TRENCH CAPACITOR
GOLDBACH MATTHIAS, ORTH ANDREAS, MANGER DIRK, HEINECK LARS, HECHT THOMAS, KUDELKA STEPHAN, BIRNER ALBERT, LUTZEN JORN
Year of Publication 11.02.2004
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Year of Publication 11.02.2004
Patent