DUAL GATE OXIDE PROCESS FOR UNIFORM OXIDE THICKNESS
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Year of Publication 10.05.2002
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Year of Publication 10.05.2002
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METHOD FOR HYBRID DRAM CELL UTILIZING CONFINED STRAP ISOLATION
KUDELKA, STEPHAN, RADENS, CARL, J, DIVAKARUNI, RAMACHANDRA, MANDELMAN, JACK, A
Year of Publication 10.05.2002
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Year of Publication 10.05.2002
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Low temperature self-aligned collar formation
Michaelis, Alexander, Kudelka, Stephan, Beintner, Jochen, Genz, Oliver
Year of Publication 05.03.2002
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Year of Publication 05.03.2002
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Method for patterning ceramic layers
JAKSCHIK STEFAN, SCHROEDER UWE, HECHT THOMAS, KUDELKA STEPHAN, SEIDL HARALD, SCHMEIDE MATTHIAS, GUTSCHE MARTIN
Year of Publication 11.10.2005
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Year of Publication 11.10.2005
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Method for patterning ceramic layers
Seidl, Harald, Gutsche, Martin, Hecht, Thomas, Jakschik, Stefan, Kudelka, Stephan, Schröder, Uwe, Schmeide, Matthias
Year of Publication 11.10.2005
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Year of Publication 11.10.2005
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Semiconductor trench structure
Birner, Albert, Goldbach, Matthias, Hecht, Thomas, Heineck, Lars, Kudelka, Stephan, Lützen, Jörn, Manger, Dirk, Orth, Andreas
Year of Publication 19.07.2005
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Year of Publication 19.07.2005
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Semiconductor trench structure
GOLDBACH MATTHIAS, ORTH ANDREAS, MANGER DIRK, HEINECK LARS, HECHT THOMAS, KUDELKA STEPHAN, BIRNER ALBERT, LUETZEN JOERN
Year of Publication 19.07.2005
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Year of Publication 19.07.2005
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Method for fabricating a trench capacitor with an insulation collar
HEINECK LARS, KUDELKA STEPHAN, POPP MARTIN, MOLL HANS-PETER, SCHLOESSER TILL, STEINMETZ JOHANN, LUETZEN JOERN
Year of Publication 12.07.2005
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Year of Publication 12.07.2005
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Method for fabricating a trench capacitor with an insulation collar
Heineck, Lars, Kudelka, Stephan, Lützen, Jörn, Moll, Hans-Peter, Popp, Martin, Schlösser, Till, Steinmetz, Johann
Year of Publication 12.07.2005
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Year of Publication 12.07.2005
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LOW TEMPERATURE SELF-ALIGNED COLLAR FORMATION
KUDELKA, STEPHAN, GENZ, OLIVER, MICHAELIS, ALEXANDER, BEINTNER, JOCHEN
Year of Publication 14.12.2000
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Year of Publication 14.12.2000
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Semiconductor structures and manufacturing methods
Tews, Helmut, Michaelis, Alexander, Kudelka, Stephan, Schroeder, Uwe, Jammy, Raj, Gruening, Ulrike
Year of Publication 21.10.2004
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Year of Publication 21.10.2004
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Method for fabricating a trench capacitor with an insulation collar
Heineck, Lars, Kudelka, Stephan, Lutzen, Jorn, Moll, Hans-Peter, Popp, Martin, Schlosser, Till, Steinmetz, Johann
Year of Publication 07.10.2004
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Year of Publication 07.10.2004
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Method for fabricating a trench capacitor with an insulation collar
SCHLOSSER TILL, HEINECK LARS, KUDELKA STEPHAN, POPP MARTIN, LUTZEN JORN, MOLL HANS-PETER, STEINMETZ JOHANN
Year of Publication 07.10.2004
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Year of Publication 07.10.2004
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Abscheidungsverfahren für ein Dielektrikum mit einem Übergangs-Metall
KUDELKA, STEPHAN, SCHUMANN, JOERG, SCHROEDER, UWE, SAENGER, ANNETTE, BOESCKE, TIM, HEITMANN, JOHANNES, ERBEN, ELKE, OBERBECK, LARS
Year of Publication 13.09.2012
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Year of Publication 13.09.2012
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