Compatibility of High K Dielectric with TiCl4 Based TiN for MIS Storage Capacitors for sub 70 nm DT DRAM Technology and Beyond
Gay, Xavier, Hintze, Bernd, Erben, Elke, Bernhardt, Henry, kudelka, Stephan, Goupil, Christophe, Mercey, Bernhard
Published in Meeting abstracts (Electrochemical Society) (17.02.2006)
Published in Meeting abstracts (Electrochemical Society) (17.02.2006)
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Journal Article
Deposition method for a transition-metal-containing dielectric
Kudelka, Stephan, Oberbeck, Lars, Schroeder, Uwe, Boescke, Tim, Heitmann, Johannes, Saenger, Annette, Schumann, Joerg, Erben, Elke
Year of Publication 23.02.2010
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Year of Publication 23.02.2010
Patent
Deposition method for a transition-metal-containing dielectric
ERBEN ELKE, HEITMANN JOHANNES, OBERBECK LARS, SCHROEDER UWE, SAENGER ANNETTE, SCHUMANN JOERG, KUDELKA STEPHAN, BOESCKE TIM
Year of Publication 23.02.2010
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Year of Publication 23.02.2010
Patent
INSULATOR MATERIAL OVER BURIED CONDUCTIVE LINE
PATZ MATTHIAS, RADECKER JOERG, KUDELKA STEPHAN, SCHOLZ ARND, VON KLUGE JOHANNES, AVELLAN ALEJANDRO
Year of Publication 31.12.2009
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Year of Publication 31.12.2009
Patent
Verfahren und Strukturen zur Erhöhung der Strukturdichte und der Speicherkapazität in einem Halbleiterwafer
KUDELKA, STEPHAN, TEWS, HELMUT, BIRNER, ALBERT, WEIS, ROLF, LUETZEN, JOERN
Year of Publication 23.11.2006
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Year of Publication 23.11.2006
Patent
Method for patterning ceramic layers
KUDELKA, STEPHAN, SEIDL, HARALD, HECHT, THOMAS, GUTSCHE, MARTIN, JAKSCHIK, STEFAN
Year of Publication 01.01.2006
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Year of Publication 01.01.2006
Patent