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Compact configurable modular radio frequency matching network assembly for plasma processing systems
by
SHINDE, RANJIT INDRAJIT
,
ANWAR, SUHAIL
,
KUDELA
,
JAZEF
Year of Publication
21.09.2019
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Compact configurable modular radio frequency matching network assembly for plasma processing systems
by
SHINDE, RANJIT INDRAJIT
,
ANWAR, SUHAIL
,
KUDELA
,
JAZEF
Year of Publication
16.02.2016
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Electrode and power coupling scheme for uniform process in a large-area PECVD chamber
by
TANAKA, TSUTOMU
,
KUDELA
,
JAZEF
Year of Publication
01.07.2010
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basic electric elements
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electric discharge tubes or discharge lamps
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production of accelerated electrically-charged particles or ofneutrons
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