Search Results - "KUBASCH CHRISTOPH" :: K.UTB vyhledávací portál

Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films in Cu/low-k interconnects

by Wojcik, Henry, Hossbach, Christoph, Kubasch, Christoph, Verdonck, Patrick, Barbarin, Yohan, Merkel, Ulrich, Bartha, Johann W., Hübner, Rene, Engelmann, Hans-Jürgen, Friedemann, Michael
Published in Microelectronic engineering (01.10.2013)

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SEMICONDUCTOR DIE WITH A POWER DEVICE AND METHOD OF MANUFACTURING THE SAME

by TEGEN STEFAN, FINNEY ADRIAN, KUBASCH CHRISTOPH, WEIS ROLF, KROENKE MATTHIAS, FERRARA ALESSANDRO
Year of Publication 14.09.2022

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$Investigation of Moisture Uptake in Low- \kappa Dielectric Materials$

Investigation of Moisture Uptake in Low- \kappa Dielectric Materials

by Kubasch, Christoph, Klaus, Christoph, Ruelke, Hartmut, Mayer, Ulrich, Bartha, Johann W
Published in IEEE transactions on electron devices (01.08.2010)

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$Fourier Transform Infrared Spectroscopy of Moisturized Low- \kappa Dielectric Materials$

Fourier Transform Infrared Spectroscopy of Moisturized Low- \kappa Dielectric Materials

by Kubasch, C., Schumacher, H., Ruelke, H., Mayer, U., Bartha, J. W.
Published in IEEE transactions on electron devices (01.09.2011)

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Fourier Transform Infrared Spectroscopy of Moisturized Low-[Formula Omitted] Dielectric Materials

by Kubasch, Christoph, Schumacher, Henrik, Ruelke, Hartmut, Mayer, Ulrich, Bartha, Johann W
Published in IEEE transactions on electron devices (01.09.2011)

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Investigation of Moisture Uptake in Low-[Formula Omitted] Dielectric Materials

by Kubasch, Christoph, Klaus, Christoph, Ruelke, Hartmut, Mayer, Ulrich, Bartha, Johann W
Published in IEEE transactions on electron devices (01.08.2010)

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Journal Article