A newly MEMS vacuum gauge with multi-modes for low vacuum measurement
wang, Chengxiang, Hou, Zhanqiang, Kuang, Yunbin, Wu, Yulie, Zhang, Yongmeng, Wu, Xuezhong, Xiao, Dingbang
Published in Vacuum (01.10.2021)
Published in Vacuum (01.10.2021)
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Journal Article
A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam
Xu, Qiang, Hou, Zhanqiang, Kuang, Yunbin, Miao, Tongqiao, Ou, Fenlan, Zhuo, Ming, Xiao, Dingbang, Wu, Xuezhong
Published in Micromachines (Basel) (25.11.2019)
Published in Micromachines (Basel) (25.11.2019)
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Journal Article
Enhancing airtightness of TGV through regulating interface energy for wafer-level vacuum packaging
Kuang, Yunbin, Xiao, Dingbang, Zhou, Jian, zhuo, Ming, Li, Wenyin, Hou, Zhanqiang, Cui, Hongjuan, Wu, Xuezhong
Published in Microsystem technologies : sensors, actuators, systems integration (01.09.2018)
Published in Microsystem technologies : sensors, actuators, systems integration (01.09.2018)
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Journal Article
A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement
wang, Chengxiang, Wu, Yulie, Hou, Zhanqiang, Kuang, Yunbin, Zhang, Yongmeng, Wu, Xuezhong, Xiao, Dingbang
Published in 2020 IEEE Sensors (25.10.2020)
Published in 2020 IEEE Sensors (25.10.2020)
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Conference Proceeding
Research on the Stress Optimization of the MEMS Gyroscope with Isolation Structure
Sun, Han, Kuang, Yunbin
Published in 2024 International Conference on Electronic Engineering and Information Systems (EEISS) (13.01.2024)
Published in 2024 International Conference on Electronic Engineering and Information Systems (EEISS) (13.01.2024)
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Conference Proceeding
Research on the Temperature-dependent Performance Improvement of Butterfly Gyroscope with Stress Isolation
Kuang, Yunbin, Xiao, Dingbang, Hou, Zhanqiang, Wu, Xuezhong, Liu, Gao
Published in 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (14.05.2023)
Published in 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (14.05.2023)
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Conference Proceeding
Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity
Wang, Chengxiang, Kuang, Yunbin, Wu, Yulie, Hou, Zhanqiang, Zhang, Yongmeng, Wu, Xuezhong, Xiao, Dingbang
Published in 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (25.04.2021)
Published in 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (25.04.2021)
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Conference Proceeding
Research of Wafer-Level Vacuum Packaging Based on TGV Technology for MEMS Devices
Kuang, Yunbin, Hou, Zhanqiang, Zhuo, Ming, Xu, Qiang, Li, Qingsong, Xiao, Bin, Shan, Heng, Xiao, Dingbang, Wu, Xuezhong
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
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Conference Proceeding
Theoretical model and experiments of glass reflow process in TGV for 3D wafer-level packaging
Kuang, Yunbin, Xiao, Dingbang, Zhou, Jian, Li, Wenyin, Hou, Zhanqiang, Cui, Hongjuan, Wu, Xuezhong
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
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Conference Proceeding
Theoretical analysis and experimental verification for 3D TGV packaging technology
Kuang, Yunbin, Xiao, Dingbang, Zhou, Jian, Li, Wenyin, Hou, Zhanqiang, Cui, Hongjuan, Wu, Xuezhong
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Fused quartz micromechanical gyroscope with in-plane sensitive axis and preparation method thereof
JIAN DUNXIANG, HOU ZHANQIANG, ZHUO MING, KUANG YUNBIN, XIAO DINGBANG, WU XUEZHONG
Year of Publication 23.11.2021
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Year of Publication 23.11.2021
Patent
Capacitive MEMS structure electrode gap measuring system and method
HOU ZHANQIANG, LI QINGSONG, KUANG YUNBIN, XI XIANG, ZHANG YONGMENG, XIAO DINGBANG, WU XUEZHONG, LIU GAO
Year of Publication 26.05.2023
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Year of Publication 26.05.2023
Patent
MEMS accelerometer output signal regulation and control circuit and method
HOU ZHANQIANG, LI QINGSONG, WANG BEIZHEN, KUANG YUNBIN, ZHANG YONGMENG, XI XIANG, XIAO DINGBANG, WU XUEZHONG, LIU GAO
Year of Publication 07.03.2023
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Year of Publication 07.03.2023
Patent