Metrology for Measuring Bumps in a Protection Layer Based on Phase Shifting Fringe Projection
Ku, Yi-Sha, Chang, Po-Yi, Lee, Han-Wen, Lo, Chun-Wei, Chen, Yi-Chang, Cho, Chia-Hung
Published in Applied sciences (01.01.2022)
Published in Applied sciences (01.01.2022)
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Journal Article
EUV scatterometer with a high-harmonic-generation EUV source
Ku, Yi-Sha, Yeh, Chia-Liang, Chen, Yi-Chang, Lo, Chun-Wei, Wang, Wei-Ting, Chen, Ming-Chang
Published in Optics express (28.11.2016)
Published in Optics express (28.11.2016)
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Journal Article
Spectroscopic Reflectometry for Optimizing 3D Through-Silicon-Vias Process
Ku, Yi-Sha, Lo, Chun-Wei, Lee, Cheng-Kang, Cho, Chia-Hung, Cheah, Wen-Qii, Chou, Po-Wen
Published in Metrology (22.11.2023)
Published in Metrology (22.11.2023)
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Journal Article
System for Measuring Three-Dimensional Micro-Structure Based on Phase Shifting Fringe Projection
Cho, Chia-Hung, Ku, Yi-Sha, Chang, Po-Yi, Lee, Han-Wen, Lo, Chun-Wei, Chen, Yi-Chang
Published in 2019 International Wafer Level Packaging Conference (IWLPC) (01.10.2019)
Published in 2019 International Wafer Level Packaging Conference (IWLPC) (01.10.2019)
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Conference Proceeding
In situ investigation of sputter-deposited thin films by ion sputtering spectrometry
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Journal Article
Conference Proceeding
Heterogeneous integration detecting method and heterogeneous integration detecting apparatus
Lo, Chieh-Yi, Lo, Chun-Wei, Wei, Hsiang-Chun, Ku, Yi-Sha, Kuo, Chung-Lun, Liu, Chih-Hsiang
Year of Publication 11.06.2024
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Year of Publication 11.06.2024
Patent
HETEROGENEOUS INTEGRATION DETECTING METHOD AND HETEROGENEOUS INTEGRATION DETECTING APPARATUS
Lo, Chieh-Yi, Lo, Chun-Wei, Wei, Hsiang-Chun, Ku, Yi-Sha, Kuo, Chung-Lun, Liu, Chih-Hsiang
Year of Publication 18.05.2023
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Year of Publication 18.05.2023
Patent
An experimental study in the design of high-stability gas dielectric capacitors
Yi-sha Ku, Yuan-lun Tsai, Chen, G.
Published in Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) (1994)
Published in Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) (1994)
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Conference Proceeding
Three-dimension measurement device and operation method thereof
Chuang, Kai-Ping, Ku, Yi-Sha, Cho, Chia-Hung, Chang, Po-Yi, Liu, Chih-Hsiang, Yang, Fu-Cheng
Year of Publication 15.02.2022
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Year of Publication 15.02.2022
Patent
Measurement system
Cho Chia-Hung, Liu Chih-Hsiang, Lo Chun-Wei, Wu Chieh-Yu, Ku Yi-Sha, Wei Hsiang-Chun
Year of Publication 05.09.2017
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Year of Publication 05.09.2017
Patent