Finite element analysis on von Mises stress distributions of Si DSP
Wang, Yongtao, Ku, Liming, Suo, Sizhuo, Dang, Yuxing, Ge, Zhong, Yan, Zhirui, Zhou, Qigang
Published in Materials science in semiconductor processing (01.02.2013)
Published in Materials science in semiconductor processing (01.02.2013)
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Journal Article
Method and system for testing recovery rate of metal on surface of silicon wafer
CHEN HAIBIN, YU XINGRUI, PAN SHILIN, KU LIMING, WANG YUE, YANG JINGXIANG, YAN ZHIRUI
Year of Publication 08.12.2023
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Year of Publication 08.12.2023
Patent
Method for improving edge mechanical damage of silicon polished wafer
CHEN HAIBIN, YU XINGRUI, PAN SHILIN, KU LIMING, WANG YUE, YAN ZHIRUI, LI LEI
Year of Publication 05.12.2023
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Year of Publication 05.12.2023
Patent
Method for improving surface appearance and surface flatness of wafer after single-side polishing
WANG WEI, KU LIMING, ZHANG QINGYANG, LU YICHEN, WANG YUE, SONG TONGJING, ZHONG GENGHANG, XIAO QINGHUA, YAN ZHIRUI, LI LEI
Year of Publication 19.07.2024
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Year of Publication 19.07.2024
Patent
Device and method for correcting diamond cutting tool
ZHANG LEI, KU LIMING, YANG WEIGUO, ZHU QINFA, ZHANG WENQI, LI YAGUANG
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
Patent
Device and method for silicon ring chamfering
BAI DUJUAN, MENG XUEYING, YUAN WEILONG, KU LIMING, ZHU QINFA, LI YAGUANG
Year of Publication 25.06.2019
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Year of Publication 25.06.2019
Patent
Epitaxial wafer cleaning and packaging method
WANG LEI, SHENG FANGYU, FENG QUANLIN, KU LIMING, LI ZONGFENG, LI QINGBAO, ZHAO ERJING, YAN ZHIRUI
Year of Publication 29.04.2015
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Year of Publication 29.04.2015
Patent
Method for eliminating micro particle aggregation on surface of 12-inch monocrystalline silicon epitaxial wafer
GE ZHONG, SHENG FANGYU, FENG QUANLIN, KU LIMING, LI ZONGFENG, WANG YONGTAO, ZHAO ERJING, YAN ZHIRUI
Year of Publication 29.04.2015
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Year of Publication 29.04.2015
Patent
Silicon ring machining method
BAI DUJUAN, MENG XUEYING, KU LIMING, XIA QING, ZHU QINFA, LU JINJUN, YAN ZHIRUI
Year of Publication 25.06.2019
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Year of Publication 25.06.2019
Patent