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Quality improvement of 4″ 4H-SiC crystal by using modified seed adhesion method

Quality improvement of 4″ 4H-SiC crystal by using modified seed adhesion method

by Kyun, Myung Ok, Choi, Jung Woo, Seo, Jung Doo, Kim, Jung Gyu, Jang, Yeon Suk, Park, Jong Hwi, Ku, Kap Ryeol, Kim, Hwang Ju, Lee, Dong Hoon, Lee, Won Jae
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)

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Conference Proceeding Journal Article

The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders

The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders

by Yeo, Im-Gyu, Lee, Tae-Woo, Lee, Won-Jae, Shin, Byoung-Chul, Choi, Jung-Woo, Ku, Kap-Ryeol, Kim, Young-Hee
Published in Transactions on electrical and electronic materials (2010)

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Journal Article

Modified Hot-Zone Design for Large Diameter 4H-SiC Single Crystal Growth

Modified Hot-Zone Design for Large Diameter 4H-SiC Single Crystal Growth

by Kyun, Myung Ok, Choi, Jung Woo, Seo, Jung Doo, Kim, Jung Gyu, Ko, Sang Ki, Ku, Kap Ryeol, Lee, Won Jae, Jang, Byung Kyu, Choi, Jeong Min
Published in Materials science forum (19.07.2019)

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Journal Article

Modified Hot-Zone Design of Growth Cell for Reducing the Warpage of 6”-SiC Wafer

Modified Hot-Zone Design of Growth Cell for Reducing the Warpage of 6”-SiC Wafer

by Kyun, Myung Ok, Choi, Jung Woo, Kim, Jung Gyu, Yang, Eunsu, Ko, Sang Ki, Park, Jong Hwi, Ku, Kap Ryeol, Lee, Won Jae, Jang, Byung Kyu, Jang, Yeon Suk
Published in Materials science forum (28.07.2020)

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Journal Article

Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process

Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process

by Kyun, Myung Ok, Choi, Jung Woo, Kim, Jung Gyu, Yang, Eunsu, Kim, Dae Sung, Ko, Sang Ki, Park, Jong Hwi, Ku, Kap Ryeol, Lee, Won Jae, Jang, Byung Kyu
Published in Materials science forum (28.07.2020)

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Journal Article

Temperature Gradient Control with an Air-Pocket Design for Growth of High Quality SiC Crystal

Temperature Gradient Control with an Air-Pocket Design for Growth of High Quality SiC Crystal

by Seo, Jung Doo, Lee, Seung Jun, Kim, Su Ho, Jang, Yeon Suk, Lee, Won Jae, Park, Jong Hwi, Kim, Jung Gyu, Choi, Jung Woo, Kyun, Myung Ok, Ku, Kap Ryeol
Published in Solid state phenomena (30.05.2023)

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Journal Article

Polytype Control by Pretreatment of SiC Source Powder for 4H-SiC Single Crystal Growth

Polytype Control by Pretreatment of SiC Source Powder for 4H-SiC Single Crystal Growth

by Kyun, Myung Ok, Choi, Jung Woo, Seo, Jung Doo, Lee, Won Jae, Kim, Jung Gyu, Lee, Chae Young, Ko, Sang Ki, Ku, Kap Ryeol, Jang, Byung Kyu
Published in Materials science forum (19.07.2019)

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Journal Article

Resistivity Increase in 6H-SiC Crystal Grown with Simple Modification in PVT Process

Resistivity Increase in 6H-SiC Crystal Grown with Simple Modification in PVT Process

by Park, Jong Hwi, Kyun, Myung Ok, Choi, Jung Woo, Seo, Jung Doo, Choi, Su Hun, Kim, Jung Gyu, Ku, Kap Ryeol, Lee, Won Jae, Kim, Young Gon
Published in Materials science forum (05.06.2018)

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Journal Article

Growth and characteristics of annealed ZnO layer on 6H–SiC substrate

Growth and characteristics of annealed ZnO layer on 6H–SiC substrate

by Lee, Ju-Young, Seung Kim, Hong, Lee, Won-Jae, Ku, Kap-Ryeol
Published in Journal of crystal growth (01.08.2010)

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Journal Article

Manufacturing method of silicon carbide wafer, silicon carbide wafer and system for manufacturing wafer

Manufacturing method of silicon carbide wafer, silicon carbide wafer and system for manufacturing wafer

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol, Seo, Jung Doo, Park, Jong Hwi
Year of Publication 30.04.2024

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Patent

Method for growing single crystal silicon carbide ingot having large diameter

Method for growing single crystal silicon carbide ingot having large diameter

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol
Year of Publication 24.05.2022

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Patent

Wafer and method of manufacturing wafer

Wafer and method of manufacturing wafer

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol, Park, Jong Hwi, Kyun, Myung-Ok
Year of Publication 02.01.2024

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Patent

Apparatus for growing a SiC single crystal ingot comprising a filter unit having a porous body surrounding an opening unit that is located under a seed crystal

Apparatus for growing a SiC single crystal ingot comprising a filter unit having a porous body surrounding an opening unit that is located under a seed crystal

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol, Jang, Byung Kyu, Ko, Sang Ki
Year of Publication 02.01.2024

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Patent

Method of growing semi-insulating silicon carbide single crystal using dopant coated with a carbon-based material

Method of growing semi-insulating silicon carbide single crystal using dopant coated with a carbon-based material

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol, Jang, Byung Kyu, Ko, Sang Ki
Year of Publication 19.12.2023

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Patent

Silicon carbide wafer and method of manufacturing same

Silicon carbide wafer and method of manufacturing same

by Choi, Jung Woo, Kim, Jung Gyu, Seo, Jung Doo, Park, Jong Hwi, Kyun, Myung Ok, Ku, Kap Ryeol
Year of Publication 16.07.2024

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Patent

SILICON CARBIDE WAFER AND METHOD OF MANUFACTURING SAME

SILICON CARBIDE WAFER AND METHOD OF MANUFACTURING SAME

by Choi, Jung Woo, KYUN, Myung Ok, Kim, Jung Gyu, Seo, Jung Doo, Park, Jong Hwi, Ku, Kap Ryeol
Year of Publication 11.05.2023

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Patent

Wafer manufacturing method, epitaxial wafer manufacturing method, and wafer and epitaxial wafer manufactured thereby

Wafer manufacturing method, epitaxial wafer manufacturing method, and wafer and epitaxial wafer manufactured thereby

by Choi, Jung Woo, Kim, Jung-Gyu, Yang, Eun Su, Ku, Kap-Ryeol, Lee, Yeon Sik, Park, Jong Hwi, Jang, Byung Kyu, Ko, Sang Ki
Year of Publication 26.03.2024

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Patent

Method of measuring a graphite article, apparatus for a measurement, and ingot growing system

Method of measuring a graphite article, apparatus for a measurement, and ingot growing system

by Choi, Jung Woo, Kim, Jung-Gyu, Yang, Eun Su, Shim, Jongmin, Ku, Kap-Ryeol, Park, Jong Hwi, Jang, Byung Kyu, Ko, Sang Ki
Year of Publication 26.12.2023

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Patent

Seed crystal including protective film including a first layer with first filler and second layer with second filler

Seed crystal including protective film including a first layer with first filler and second layer with second filler

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol, Jang, Byung Kyu, Ko, Sang Ki
Year of Publication 08.03.2022

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Patent

Method for producing ingot, raw material for ingot growth, and method for preparing the raw material

Method for producing ingot, raw material for ingot growth, and method for preparing the raw material

by Choi, Jung Woo, Kim, Jung-Gyu, Ku, Kap-Ryeol, Jang, Byung Kyu, Ko, Sang Ki
Year of Publication 18.01.2022

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Patent

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