Reliable Lift‐Off Patterning of Graphene Dispersions for Humidity Sensors
Adatti Estévez, Jorge Eduardo, Hecht, Fabian, Wittmann, Sebastian, Sawallich, Simon, Weber, Annika, Travan, Caterina, Hopperdietzl, Franz, Krumbein, Ulrich, Lemme, Max Christian
Published in Advanced materials interfaces (01.06.2024)
Published in Advanced materials interfaces (01.06.2024)
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Journal Article
Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes
Bosetti, Gabriele, Manz, Johannes, Dehé, Alfons, Krumbein, Ulrich, Schrag, Gabriele
Published in Microsystem technologies : sensors, actuators, systems integration (01.06.2022)
Published in Microsystem technologies : sensors, actuators, systems integration (01.06.2022)
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Journal Article
Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modelingThis work was carried out at the Technical University of Munich, Chair for Physics of Electrotechnology. Thomas Kuenzig is now with Infineon Technologies AG, Neubiberg
Kuenzig, Thomas, Dehé, Alfons, Krumbein, Ulrich, Schrag, Gabriele
Published in Journal of micromechanics and microengineering (14.03.2018)
Published in Journal of micromechanics and microengineering (14.03.2018)
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Journal Article
Development of Graphene Based Inks for Deposition via Inkjet Printing for Sensing Application
Caterina Travan, Martin Mischitz, Alexander Zöpfl, Ulrich Krumbein, Prashant Makaram
Published in Proceedings (01.12.2018)
Published in Proceedings (01.12.2018)
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Journal Article
Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers
Gabriele Bosetti, Johannes Manz, Ulrich Krumbein, Gabriele Schrag
Published in Proceedings (01.11.2018)
Published in Proceedings (01.11.2018)
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Journal Article
MEMS MEMS Pump
FRUECHTL DANIEL, SEIDL MARTIN, STRASSER JOHANN, VOBL MATTHIAS, KRUMBEIN ULRICH, KLEIN WOLFGANG, DEHE ALFONS
Year of Publication 18.02.2021
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Year of Publication 18.02.2021
Patent
Design of a poly silicon MEMS microphone for high signal-to-noise ratio
Dehe, Alfons, Wurzer, Martin, Fuldner, Marc, Krumbein, Ulrich
Published in 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2013)
Published in 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2013)
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Conference Proceeding
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
FUELDNER MARC, WAGNER JUERGEN, TKACHUK KONSTANTIN, KRUMBEIN ULRICH, ANGELOPOULOS EVANGELOS, TOSOLINI GIORDANO, HERRMANN MATTHIAS FRIEDRICH, KLEIN WOLFGANG, GEISSLER STEFAN, BARZEN STEFAN
Year of Publication 03.03.2021
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Year of Publication 03.03.2021
Patent
MEMS MEMS MICROPHONE
WAGNER JUERGEN, STRASSER JOHANN, WALTHER ARNAUD, KRUMBEIN ULRICH, METZGER BRUECKL GERHARD, DEHE ALFONS
Year of Publication 27.03.2019
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Year of Publication 27.03.2019
Patent
MEMS MEMS ASSEMBLY
FUELDNER MARC, DE MILLERI NICCOLO, GOLLER BERND, WIESBAUER ANDREAS, KRUMBEIN ULRICH, TOSOLINI GIORDANO, LOHNINGER GERHARD
Year of Publication 11.09.2019
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Year of Publication 11.09.2019
Patent
MEMS STRUCTURE WITH ADJUSTABLE VENTILATION OPENINGS
FRIZA WOLFGANG, WURZER MARTIN, KRUMBEIN ULRICH, HERRMANN MATTHIAS FRIEDRICH, KLEIN WOLFGANG, DEHE ALFONS, BARZEN STEFAN
Year of Publication 20.03.2015
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Year of Publication 20.03.2015
Patent