Ultra-shallow junction formation by B18H22 ion implantation
Kawasaki, Y., Kuroi, T., Yamashita, T., Horita, K., Hayashi, T., Ishibashi, M., Togawa, M., Ohno, Y., Yoneda, M., Horsky, Tom, Jacobson, Dale, Krull, Wade
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2005)
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Journal Article
Silicon-Carbon Formed Using Cluster-Carbon Implant and Laser-Induced Epitaxy for Application as Source/Drain Stressors in Strained n-Channel MOSFETs
Koh, Shao-Ming, Wang, Xincai, Sekar, Karuppanan, Krull, Wade, Samudra, Ganesh S., Yeo, Yee-Chia
Published in Journal of the Electrochemical Society (2009)
Published in Journal of the Electrochemical Society (2009)
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Journal Article
ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME
WALDFRIED CARLO, RYBCZYNSKI JAKUB, HANAGAN MICHAEL, COOKE RICHARD A, NEFF WOLFRAM, KRULL WADE
Year of Publication 11.10.2016
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Year of Publication 11.10.2016
Patent
Optimization of ClusterCarbon™ process parameters for strained Si lattice
Sekar, Karuppanan, Krull, Wade A., Horsky, Thomas N., Feudel, Thomas, Krüger, Christian, Flachowsky, Stefan, Ostermay, Ina
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Optimization of ClusterCarbonTM process parameters for strained Si lattice
Sekar, Karuppanan, Krull, Wade A, Horsky, Thomas N, Feudel, Thomas, Kruger, Christian, Flachowsky, Stefan, Ostermay, Ina
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
N-Channel MOSFETs With Embedded Silicon-Carbon Source/Drain Stressors Formed Using Cluster-Carbon Implant and Excimer-Laser-Induced Solid Phase Epitaxy
Shao-Ming Koh, Sekar, K., Lee, D., Krull, W., Xincai Wang, Samudra, G.S., Yee-Chia Yeo
Published in IEEE electron device letters (01.12.2008)
Published in IEEE electron device letters (01.12.2008)
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Journal Article
Increase of Carbon Substitutionality and Silicon Strain by Molecular Ion Implantation
Li-Fatou, Andrei, Jain, Amitabh, Krull, Wade, Ameen, Mike, Harris, Mark, Jacobson, Dale
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
Microwave Annealing of Phosphorus and Cluster Carbon Implanted (100) and (110) Si
Cho, Ta-Chun, Lu, Yu-Lun, Yao, Jie-Yi, Lee, Yao-Jen, Sekar, Karuppanan, Tokoro, Nobuhiro, Onoda, Hiroshi, Krull, Wade, Current, Michael I., Chao, Tien-Sheng
Published in ECS journal of solid state science and technology (01.01.2013)
Published in ECS journal of solid state science and technology (01.01.2013)
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Journal Article
ClusterBoron Implant Alternative to BF{sub 2} PMOS SDE
Feudel, Thomas, Illgen, Ralf, Krueger, Christian, Braun, Marek, Sekar, Karuppanan, Lee, David, Krull, Wade
Published in AIP conference proceedings (03.11.2008)
Published in AIP conference proceedings (03.11.2008)
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Journal Article
ClusterBoronTM Implant Alternative to BF2 PMOS SDE
Feudel, Thomas, Illgen, Ralf, Kruger, Christian, Braun, Marek, Sekar, Karuppanan, Lee, David, Krull, Wade
Published in Ion Implantation Technology 2008 (01.01.2008)
Published in Ion Implantation Technology 2008 (01.01.2008)
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Journal Article
Advances in molecular implant technology
Krull, Wade
Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
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Conference Proceeding
Strained Si:C Using ClusterCarbon Implant
Sekar, Karuppanan, Krull, Wade
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
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Journal Article
ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME
NEFF, Wolfram, COOKE, Richard A, KRULL, Wade, RYBCZYNSKI, Jakub, HANAGAN, Michael, WALDFRIED, Carlo
Year of Publication 23.06.2021
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Year of Publication 23.06.2021
Patent
Electrostatic chuck and method of making same
Cooke, Richard A, Waldfried, Carlo, Krull, Wade, Neff, Wolfram, Rybczynski, Jakub, Hanagan, Michael
Year of Publication 03.12.2019
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Year of Publication 03.12.2019
Patent
ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME
NEFF, Wolfram, KRULL, Wade, RYBCZYNSKI, Jakub, HANAGAN, Michael, COOKE, Richard, WALDFRIED, Carlo
Year of Publication 27.09.2018
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Year of Publication 27.09.2018
Patent