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SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS

by KRULL WADE A, HORSKY THOMAS N
Year of Publication 09.12.2013

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Patent

Optimization of ClusterCarbon™ process parameters for strained Si lattice

Optimization of ClusterCarbon™ process parameters for strained Si lattice

by Sekar, Karuppanan, Krull, Wade A., Horsky, Thomas N., Feudel, Thomas, Krüger, Christian, Flachowsky, Stefan, Ostermay, Ina
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)

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Journal Article

Optimization of ClusterCarbonTM process parameters for strained Si lattice

Optimization of ClusterCarbonTM process parameters for strained Si lattice

by Sekar, Karuppanan, Krull, Wade A, Horsky, Thomas N, Feudel, Thomas, Kruger, Christian, Flachowsky, Stefan, Ostermay, Ina
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)

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Journal Article

SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE BY IMPLANTATION OF CARBON CLUSTER

SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE BY IMPLANTATION OF CARBON CLUSTER

by WADE A KRULL, THOMAS N HORSKY
Year of Publication 04.09.2014

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Patent

METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS

METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS

by KRULL, WADE, A, HORSKY, THOMAS, N
Year of Publication 16.10.2013

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Patent

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

by KRULL WADE A, HORSKY THOMAS N
Year of Publication 10.09.2013

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Patent

Semiconductor device and method of fabricating a semiconductor device

Semiconductor device and method of fabricating a semiconductor device

by Krull, Wade A, Jacobson, Dale C
Year of Publication 07.08.2012

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Patent

Semiconductor device and method of fabricating a semiconductor device

Semiconductor device and method of fabricating a semiconductor device

by KRULL WADE A, JACOBSON DALE C
Year of Publication 07.08.2012

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Patent

Method of implanting ions

Method of implanting ions

by KRULL, WADE, A, HORSKY, THOMAS, N
Year of Publication 27.06.2012

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Patent

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

by Krull, Wade A, Horsky, Thomas N
Year of Publication 17.01.2012

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Patent

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

by KRULL WADE A, HORSKY THOMAS N
Year of Publication 17.01.2012

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Patent

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS

by KRULL WADE A, HORSKY THOMAS N
Year of Publication 15.12.2011

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Patent

Semiconductor device and method of fabricating a semiconductor device

Semiconductor device and method of fabricating a semiconductor device

by KRULL WADE A
Year of Publication 11.05.2006

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE

by KRULL WADE A, JACOBSON DALE C
Year of Publication 22.07.2010

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Patent

Semiconductor device and method of fabricating a semiconductor device

Semiconductor device and method of fabricating a semiconductor device

by Krull, Wade A, Jacobson, Dale C
Year of Publication 25.05.2010

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Patent

Semiconductor device and method of fabricating a semiconductor device

Semiconductor device and method of fabricating a semiconductor device

by KRULL WADE A, JACOBSON DALE C
Year of Publication 25.05.2010

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Patent

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

by KRULL WADE A, HORSKY THOMAS N
Year of Publication 23.02.2010

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Patent

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

by Krull, Wade A, Horsky, Thomas N
Year of Publication 23.02.2010

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

by KRULL WADE A, JACOBSON DALE C
Year of Publication 28.01.2010

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Patent

METHOD OF MANUFACTURING CMOS DEVICES BY THE IMPLANTATION OF N- AND P-TYPE CLUSTER IONS AND NEGATIVE IONS

METHOD OF MANUFACTURING CMOS DEVICES BY THE IMPLANTATION OF N- AND P-TYPE CLUSTER IONS AND NEGATIVE IONS

by JACOBSON, DALE, C, KRULL, WADE, A, HORSKY, THOMAS, N
Year of Publication 06.06.2012

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Patent

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