방사선 시스템
KRUIZINGA BORGERT, LOOPSTRA ERIK ROELOF, DE VRIES GOSSE CHARLES, BOGAART ERIK WILLEM, BOTMA HAKO, BASELMANS JOHANNES JACOBUS MATHEUS, DONKER RILPHO LUDOVICUS, NIENHUYS HAN KWANG, FRIJNS OLAV WALDEMAR VLADIMIR
Year of Publication 03.11.2017
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Year of Publication 03.11.2017
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LITHOGRAPHIC METHOD AND SYSTEM
KRUIZINGA BORGERT, BANINE VADIM, FRIJNS OLAV, LOOPSTRA ERIK, GRIMMINCK LEONARDUS, AKKERMANS JOHANNES, NIENHUYS HAN KWANG, NIKIPELOV ANDREY, LITVINENKO VLADIMIR, DONKER RILPHO, DE VRIES GOSSE, DE JAGER PIETER, LUITEN OTGER, ENGELEN WOUTER
Year of Publication 29.02.2016
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Year of Publication 29.02.2016
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BEAM DELIVERY APPARATUS AND METHOD
KRUIZINGA BORGERT, KATALENIC ANDELKO, BANINE VADIM, VAN GORKOM RAMON, FRIJNS OLAV, LOOPSTRA ERIK, GRIMMINCK LEONARDUS, NIENHUYS HAN KWANG, BARTRAIJ PETRUS, AMENT LUCAS, NIKIPELOV ANDREY, DONKER RILPHO, DE VRIES GOSSE, DE JAGER PIETER, RENKENS MICHAEL, ENGELEN WOUTER, JANSSEN FRANCISCUS
Year of Publication 03.06.2016
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Year of Publication 03.06.2016
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ILLUMINATION SYSTEM FOR USE IN A STEREOLITHOGRAPHY APPARATUS
KOOISTRA, Jentske, D, VAES, Mark Herman Else, RIJFERS, Andries, KRUIZINGA, Borgert, JAMAR, Jacobus, Hubertus, Theodoor
Year of Publication 24.07.2019
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Year of Publication 24.07.2019
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Measurement system, lithographic apparatus and device manufacturing method
Van Boxtel, Frank Johannes Jacobus, Pen, Hermen Folken, Nienhuys, Han-Kwang, Nakiboğlu, Güneş, Petit, Rita Marguerite Albin Lambertine, Kruizinga, Borgert, Van De Moesdijk, Remco Yuri
Year of Publication 18.05.2021
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Year of Publication 18.05.2021
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MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Van Boxtel, Frank Johannes Jacobus, Pen, Hermen Folken, Nakiboglu, Gunes, Nienhuys, Han-Kwang, Van de Moesdijk, Remco Yuri, Petit, Rita Marguerite Albin Lambertine, Kruizinga, Borgert
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
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FREE ELECTRON LASER AND METHOD OF GENERATING AN EUV RADIATION BEAM USING THE SAME
LOOPSTRA, Erik Roelof, NIKIPELOV, Andrey, DE JAGER, Pieter Willem Herman, GRIMMINCK, Leonardus Adrianus Gerardus, ENGELEN, Wouter Joep, DONKER, Rilpho Ludovicus, NIENHUYS, Han-Kwang, BANINE, Vadim Yevgenyevich, LITVINENKO, Vladimir, FRIJNS, Olav Waldemar Vladimir, AKKERMANS, Johannes Antonius Gerardus, DE VRIES, Gosse Charles, LUITEN, Otger Jan, KRUIZINGA, Borgert
Year of Publication 22.06.2022
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Year of Publication 22.06.2022
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