EUV Pellicle Frame for EUV Lithography
KRUIZINGA MATTHIAS, CUSTERS KRISTOF, SCHIJVENAARS LODEWIJK ALEXANDER, DE BRUIJN RON GEERAARD CATHARINA
Year of Publication 07.05.2024
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Year of Publication 07.05.2024
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EUV 리소그래피용 펠리클 프레임
KRUIZINGA MATTHIAS, CUSTERS KRISTOF, SCHIJVENAARS LODEWIJK ALEXANDER, DE BRUIJN RON GEERAARD CATHARINA
Year of Publication 04.11.2022
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Year of Publication 04.11.2022
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정전 홀더, 대상물 테이블 및 리소그래피 장치
ENGELEN JOHANNES BERNARDUS CHARLES, TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, HUANG ZHUANGXIONG, NAKIBOGLU GUENES, TRALLI ALDO, BRULS RICHARD JOSEPH, VAN DER MEULEN FRITS, KRUIZINGA MATTHIAS, VAN GILS PETRUS JACOBUS MARIA, GUAN TIANNAN, DE VRIES SJOERD FRANS
Year of Publication 12.04.2024
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Year of Publication 12.04.2024
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MASK ASSEMBLY AND ASSOCIATED METHODS
DERK SERVATIUS GERTRUDA BROUNS, DE GRAAF DENNIS, JAMES NORMAN WILEY, PAUL JANSSEN, KRUIZINGA MATTHIAS, DANIEL ANDREW SMITH, ARNOUD WILLEM NOTENBOOM, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ROBERTUS CORNELIS MARTINUS DE KRUIF
Year of Publication 10.04.2024
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Year of Publication 10.04.2024
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MASK ASSEMBLY AND ASSOCIATED METHODS
SMITH DANIEL ANDREW, DE GRAAF DENNIS, DE KRUIF ROBERTUS CORNELIS MARTINUS, JANSSEN PAUL, KRUIZINGA MATTHIAS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 19.12.2023
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Year of Publication 19.12.2023
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MEMBRANE FOR EUV LITHOGRAPHY
PIETER-JAN VAN ZWOL, MARIA PETER, WILLEM JOAN VAN DER ZANDE, MICHIEL ALEXANDER BLAUW, VAN DE KERKHOF MARCUS ADRIANUS, ANTONIUS WILLEM VERBURG, DAVID FERDINAND VLES, EGBERT LENDERINK, PAUL JANSSEN, ERIK ACHILLES ABEGG, ARNOUD WILLEM NOTENBOOM, JOHANNES PETRUS MARTINUS BERNARDUS, NIRUPAM BANERJEE, NICOLAE MAXIM, GIJSBERT RISPENS, MAXIM ALEKSANDROVICH NASALEVICH, DERK SERVATIUS GERTRUDA BROUNS, ALEXANDAR NIKOLOV ZDRAVKOV, WILLEM-PIETER VOORTHUIJZEN, KRUIZINGA MATTHIAS, ANDREY NIKIPELOV, CLAUDIA PILIEGO, SCHUH NADJA
Year of Publication 17.11.2023
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Year of Publication 17.11.2023
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MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
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APPARATUS
ROLAND JACOBUS JOHANNES KERSTENS, ANGELO CESAR PETER DE KLERK, MICHEL LOOS, VAN DER MEULEN FRITS, FRANK JOHANNES CHRISTIAAN THEUERZEIT, PAUL JANSSEN, JEROEN DEKKERS, MAARTEN MATHIJS MARINUS JANSEN, GEERT MIDDEL, MAURICE LEONARDUS JOHANNES JANSSEN, KRUIZINGA MATTHIAS, MARTINUS JOZEF MARIA KESTERS, GERRIT VAN DEN BOSCH, JACOBUS MARIA DINGS, KRAMER RONALD HARM GUNTHER, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ERIK R LOOPSTRA, ANTONIUS LEENDERS MARTINUS HENDRIKUS, SILVESTER MATHEUS REIJNDERS, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, JORGE MANUEL AZEREDO LIMA, ANNE JOHANNES WILHELMUS VAN LIEVENOOGEN, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN
Year of Publication 02.04.2024
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Year of Publication 02.04.2024
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MASK ASSEMBLY
MOHAMMAD REZA KAMALI, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, RICHARD JOSEPH BRULS, VAN DER MEULEN FRITS, PAUL JANSSEN, SANDER VAN DEN HEIJKANT, JEROEN DEKKERS, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, MAARTEN MATHIJS MARINUS JANSEN, ERIK R LOOPSTRA, ERIK WILLEM BOGAART, ANTONIUS LEENDERS MARTINUS HENDRIKUS, VAN DER GRAAF SANDRA, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, KRUIZINGA MATTHIAS, JORGE MANUEL AZEREDO LIMA, GERRIT VAN DEN BOSCH, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN, JOSEPH H LYONS, ROUX STEPHEN
Year of Publication 06.10.2023
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Year of Publication 06.10.2023
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물체 홀더, 정전 시트 및 정전 시트를 제조하는 방법
VAN DE KERKHOF MARCUS ADRIANUS, SHERVIN SHAHAB, VAN DELFT PETER, HAMELINCK ROGER FRANCISCUS MATTHEUS MARIA, VERSCHUREN MARINUS AUGUSTINUS CHRISTIAAN, VAN DE VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS, ENGELEN JOHANNES BERNARDUS CHARLES, GALAKTIONOV OLEKSIY SERGIYOVICH, KRUIZINGA MATTHIAS, UITTERDIJK TAMMO, PIJNENBURG JOHANNES ADRIANUS CORNELIS MARIA, VAN BERKEL KOOS, JANSSEN KJELD GERTRUDUS HENDRIKUS
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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MASK ASSEMBLY AND ASSOCIATED METHODS
SMITH DANIEL ANDREW, DE GRAAF DENNIS, DE KRUIF ROBERTUS CORNELIS MARTINUS, JANSSEN PAUL, KRUIZINGA MATTHIAS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 26.01.2022
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Year of Publication 26.01.2022
Patent
EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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APPARATUS
VAN DER MEULEN FRITS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, LOOS MICHEL, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DEN BOSCH GERRIT, LOOPSTRA ERIK ROELOF, REIJNDERS SILVESTER MATHEUS, VAN LIEVENOOGEN ANNE JOHANNES WILHELMUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
Year of Publication 23.06.2023
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Year of Publication 23.06.2023
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MASK ASSEMBLY
VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 24.10.2022
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Year of Publication 24.10.2022
Patent
MASK ASSEMBLY AND ASSOCIATED METHODS
DERK SERVATIUS GERTRUDA BROUNS, DE GRAAF DENNIS, JAMES NORMAN WILEY, PAUL JANSSEN, KRUIZINGA MATTHIAS, DANIEL ANDREW SMITH, ARNOUD WILLEM NOTENBOOM, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ROBERTUS CORNELIS MARTINUS DE KRUIF
Year of Publication 13.08.2020
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Year of Publication 13.08.2020
Patent
EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
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APPARATUS
ROLAND JACOBUS JOHANNES KERSTENS, ANGELO CESAR PETER DE KLERK, MICHEL LOOS, VAN DER MEULEN FRITS, FRANK JOHANNES CHRISTIAAN THEUERZEIT, PAUL JANSSEN, JEROEN DEKKERS, MAARTEN MATHIJS MARINUS JANSEN, GEERT MIDDEL, MAURICE LEONARDUS JOHANNES JANSSEN, KRUIZINGA MATTHIAS, MARTINUS JOZEF MARIA KESTERS, GERRIT VAN DEN BOSCH, JACOBUS MARIA DINGS, KRAMER RONALD HARM GUNTHER, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ERIK R LOOPSTRA, ANTONIUS LEENDERS MARTINUS HENDRIKUS, SILVESTER MATHEUS REIJNDERS, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, JORGE MANUEL AZEREDO LIMA, ANNE JOHANNES WILHELMUS VAN LIEVENOOGEN, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
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MASK ASSEMBLY
MOHAMMAD REZA KAMALI, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, RICHARD JOSEPH BRULS, VAN DER MEULEN FRITS, PAUL JANSSEN, SANDER VAN DEN HEIJKANT, JEROEN DEKKERS, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, MAARTEN MATHIJS MARINUS JANSEN, ERIK R LOOPSTRA, ERIK WILLEM BOGAART, ANTONIUS LEENDERS MARTINUS HENDRIKUS, VAN DER GRAAF SANDRA, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, KRUIZINGA MATTHIAS, JORGE MANUEL AZEREDO LIMA, GERRIT VAN DEN BOSCH, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN, JOSEPH H LYONS, ROUX STEPHEN
Year of Publication 05.11.2020
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Year of Publication 05.11.2020
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APPARATUS
ROLAND JACOBUS JOHANNES KERSTENS, ANGELO CESAR PETER DE KLERK, MICHEL LOOS, VAN DER MEULEN FRITS, FRANK JOHANNES CHRISTIAAN THEUERZEIT, PAUL JANSSEN, JEROEN DEKKERS, MAARTEN MATHIJS MARINUS JANSEN, GEERT MIDDEL, MAURICE LEONARDUS JOHANNES JANSSEN, KRUIZINGA MATTHIAS, MARTINUS JOZEF MARIA KESTERS, GERRIT VAN DEN BOSCH, JACOBUS MARIA DINGS, KRAMER RONALD HARM GUNTHER, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ERIK R LOOPSTRA, ANTONIUS LEENDERS MARTINUS HENDRIKUS, SILVESTER MATHEUS REIJNDERS, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, JORGE MANUEL AZEREDO LIMA, ANNE JOHANNES WILHELMUS VAN LIEVENOOGEN, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN
Year of Publication 13.02.2020
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Year of Publication 13.02.2020
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APPARATUS
VAN DER MEULEN FRITS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, LOOS MICHEL, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DEN BOSCH GERRIT, LOOPSTRA ERIK ROELOF, REIJNDERS SILVESTER MATHEUS, VAN LIEVENOOGEN ANNE JOHANNES WILHELMUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
Year of Publication 06.12.2019
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Year of Publication 06.12.2019
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