Experimental fabrication of an ESF3 floating gate flash cell in an FD-SOI process
Mika, Nicki, Melde, Thomas, Dunkel, Stefan, Otto, Michael, Weisbuch, Francois, Krottenthaler, Peter, Mikolajick, Thomas
Published in ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC) (19.09.2022)
Published in ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC) (19.09.2022)
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Conference Proceeding
Method of forming a material layer in a semiconductor structure
TRENTZSCH, MARTIN, KROTTENTHALER, PETER, BAYHA, BORIS, GRASS, CARSTEN
Year of Publication 01.04.2016
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Year of Publication 01.04.2016
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Verfahren zum Bilden einer Gateisolierschicht in einer Halbleiterstruktur
TRENTZSCH, MARTIN, KROTTENTHALER, PETER, BAYHA, BORIS, GRASS, CARSTEN
Year of Publication 13.05.2015
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Year of Publication 13.05.2015
Patent
METHOD OF MANUFACTURING SILICON SEMICONDUCTOR WAFER HAVING LOW DEFECT DENSITY
KROTTENTHALER PETER, WAHLICH REINHOLD, LAMBERT ULRICH, VON AMMON WILFRIED, GRAEF DIETER
Year of Publication 03.03.2011
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Year of Publication 03.03.2011
Patent
Verfahren zum Bilden einer Materialschicht in einer Halbleiterstruktur
TRENTZSCH, MARTIN, KROTTENTHALER, PETER, BAYHA, BORIS, GRASS, CARSTEN
Year of Publication 06.03.2014
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Year of Publication 06.03.2014
Patent
Method of forming a material layer in a semiconductor structure
TRENTZSCH, MARTIN, KROTTENTHALER, PETER, BAYHA, BORIS, GRASS, CARSTEN
Year of Publication 01.03.2014
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Year of Publication 01.03.2014
Patent
Silicon wafer and process for the heat treatment of a silicon wafer
MESSMANN KLAUS, STUDENER JOHANNES, DAUB ERICH, KROTTENTHALER PETER, PASSEK FRIEDRICH, MUELLER TIMO, WAHLICH REINHOLD, VON AMMON WILFRIED, KUEHHORN ARNOLD
Year of Publication 09.11.2010
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Year of Publication 09.11.2010
Patent
METHOD FOR MANUFACTURING SILICON SEMICONDUCTOR WAFER HAVING LOW DEFECT DENSITY
KROTTENTHALER PETER, WAHLICH REINHOLD, LAMBERT ULRICH, VON AMMON WILFRIED, GRAEF DIETER
Year of Publication 24.11.2006
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Year of Publication 24.11.2006
Patent
MANUFACTURING METHOD OF SILICON SEMICONDUCTOR WAFER
KROTTENTHALER PETER, WAHLICH REINHOLD, LAMBERT ULRICH, VON AMMON WILFRIED, GRAEF DIETER
Year of Publication 03.02.2005
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Year of Publication 03.02.2005
Patent
SILICON WAFER AND PROCESS FOR HEAT TREATMENT OF THE SAME
STUDENER JOHANNES, MESMANN KLAUS, DAUB ERICH, KROTTENTHALER PETER, PASSEK FRIEDRICH, MUELLER TIMO, WAHLICH REINHOLD, VON AMMON WILFRIED, KUEHHORN ARNOLD
Year of Publication 05.10.2006
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Year of Publication 05.10.2006
Patent
Silicon wafer and process for the heat treatment of a silicon wafer
MESSMANN KLAUS, STUDENER JOHANNES, DAUB ERICH, KROTTENTHALER PETER, PASSEK FRIEDRICH, MUELLER TIMO, WAHLICH REINHOLD, VON AMMON WILFRIED, KUEHHORN ARNOLD
Year of Publication 28.09.2006
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Year of Publication 28.09.2006
Patent