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Published in Journal of the Electrochemical Society (01.05.1998)
Published in Journal of the Electrochemical Society (01.05.1998)
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Method for etching having a controlled distribution of process results
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Year of Publication 19.01.2010
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Method for etching having a controlled distribution of process results
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Year of Publication 19.01.2010
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Year of Publication 25.08.2009
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Year of Publication 20.12.2007
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METHOD FOR ETCHING HAVING A CONTROLLED DISTRIBUTION OF PROCESS RESULTS
PANAGOPOULOS THEODOROS, KROPEWNICKI THOMAS J, PAU WILFRED, HOLLAND JOHN P, SHEN MEIHUA, GANI NICOLAS
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Year of Publication 12.12.2007
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METHOD FOR ETCHING HAVING A CONTROLLED DISTRIBUTION OF PROCESS RESULTS
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Year of Publication 18.10.2007
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Method for etching having a controlled distribution of process results
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Year of Publication 22.02.2007
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Year of Publication 22.02.2007
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METHOD FOR ETCHING HAVING A CONTROLLED DISTRIBUTION OF PROCESS RESULTS
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Year of Publication 08.09.2006
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Year of Publication 08.09.2006
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ALTERNATING ASYMMETRICAL PLASMA GENERATION IN A PROCESS CHAMBER
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Year of Publication 31.01.2008
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ALTERNATING ASYMMETRICAL PLASMA GENERATION IN A PROCESS CHAMBER
TODOROW VALENTIN N, NGUYEN HUONG THANH, PAVEL ELIZABETH G, KROPEWNICKI THOMAS J, PATERSON ALEXANDER, HOLLAND JOHN P, HATCHER BRIAN K
Year of Publication 23.08.2006
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Year of Publication 23.08.2006
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Alternating asymmetrical plasma generation in a process chamber
TODOROW VALENTIN N, PAVEL ELIZABETH G, KROPEWNICKI THOMAS J, PATERSON ALEXANDER, NGUYEN HUONG T, HOLLAND JOHN P, HATCHER BRIAN K
Year of Publication 03.11.2005
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Year of Publication 03.11.2005
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Method for etching having a controlled distribution of process results
PANAGOPOULOS THEODOROS, KROPEWNICKI THOMAS J, PAU WILFRED, HOLLAND JOHN P, SHEN MEIHUA, GANI NICOLAS
Year of Publication 20.07.2011
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Year of Publication 20.07.2011
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Substrate cleaning process
Kropewnicki, Thomas J, Pender, Jeremiah T, Fong, Henry, Auglis, Charles Peter, Hung, Raymond, Shan, Hongqing
Year of Publication 27.08.2002
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Year of Publication 27.08.2002
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