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Year of Publication 28.03.2013
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Year of Publication 19.03.2015
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Year of Publication 19.02.2015
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Year of Publication 19.02.2015
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CHAMBER ELEMENTS AND A METHOD FOR PLACING A CHAMBER AT A LOAD POSITION
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Year of Publication 26.07.2012
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Chamber elements and a method for placing a chamber at a load position
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Year of Publication 21.08.2016
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Year of Publication 21.08.2016
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Conductive element for electrically coupling an euvl mask to a supporting chuck
UZIEL, YORAM, YAIR, ITZAK, KRIVTS (KRAYVITZ), IGOR, AVNERI, ISRAEL, BASSON, YOSI, BEN-DAVID, NIR, HOLCMAN, IDO
Year of Publication 01.06.2015
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Year of Publication 01.06.2015
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Particle trap for electrostatic chuck
KRIVTS (KRAYVITZ) IGOR, KIDRON EITAN, BEN-DAYAN IGAL, PETROV IGOR, EITAN GUY
Year of Publication 08.01.2008
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Year of Publication 08.01.2008
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Particle trap for electrostatic chuck
Petrov, Igor, Krivts (Krayvitz), Igor, Kidron, Eitan, Eitan, Guy, Ben-Dayan, Igal
Year of Publication 08.01.2008
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Year of Publication 08.01.2008
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Particle trap for electrostatic chuck
KRIVTS (KRAYVITZ) IGOR, KIDRON EITAN, BEN-DAYAN IGAL, PETROV IGOR, EITAN GUY
Year of Publication 15.06.2006
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Year of Publication 15.06.2006
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Conductive element for electrically coupling an EUVL mask to a supporting chuck
KRIVTS KRAYVITZ IGOR, AVNERI ISRAEL, UZIEL YORAM, HOLCMAN IDO, YAIR ITZAK, BASSON YOSI, BEN-DAVID NIR
Year of Publication 15.05.2013
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Year of Publication 15.05.2013
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