Diaphragmless pressure sensor
Krivorotov, N.P., Svinolupov, Yu.G., Izaak, T.I., Bychkov, V.V.
Published in Sensors and actuators. A. Physical. (16.08.2004)
Published in Sensors and actuators. A. Physical. (16.08.2004)
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Journal Article
MULTIPLICATIVE MICROELECTRONIC PRESSURE TRANSDUCER
SVINOLUPOV JU.G, ROMAS' L.M, IVANOV E.V, BYCHKOV V.V, KRIVOROTOV N.P, IZAAK T.I
Year of Publication 27.02.2005
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Year of Publication 27.02.2005
Patent
The integrated pressure sensor with AlGaAs-baroresistors
Krivorotov, N.P., Svinolupov, Yu.G., Chan, A.V., Schegol, S.S.
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
Published in 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) (1998)
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Conference Proceeding