유동 분배 튜닝을 위한 범용 조정가능 블로커 플레이트
BALUJA SANJEEV, NGUYEN TUAN ANH, ZHANG YUXING, BANSAL AMIT KUMAR, ULAVI TEJAS, KRISHNA GOPU
Year of Publication 14.12.2020
Get full text
Year of Publication 14.12.2020
Patent
Multi-station chamber lid with precise temperature and flow control
Baluja, Sanjeev, Rice, Michael, Krishna, Gopu, Kashyap, Dhritiman Subha
Year of Publication 24.08.2021
Get full text
Year of Publication 24.08.2021
Patent
Capacitive method of detecting wafer chucking and de-chucking
Konnoth Joseph, Job George, Boosa, Syam Sundeep, Krishna, Gopu, Choudhury, Rupankar
Year of Publication 21.03.2023
Get full text
Year of Publication 21.03.2023
Patent
CAPACITIVE METHOD OF DETECTING WAFER CHUCKING AND DE-CHUCKING
BOOSA, Syam Sundeep, KRISHNA, Gopu, JOSEPH, Job George Konnoth, CHOUDHURY, Rupankar
Year of Publication 29.09.2022
Get full text
Year of Publication 29.09.2022
Patent
CAPACITIVE METHOD OF DETECTING WAFER CHUCKING AND DE-CHUCKING
Konnoth Joseph, Job George, Boosa, Syam Sundeep, Krishna, Gopu, Choudhury, Rupankar
Year of Publication 22.09.2022
Get full text
Year of Publication 22.09.2022
Patent
MULTI-STATION CHAMBER LID WITH PRECISE TEMPERATURE AND FLOW CONTROL
BALUJA, Sanjeev, KRISHNA, Gopu, KASHYAP, Dhritiman Subha, RICE, Michael
Year of Publication 02.04.2020
Get full text
Year of Publication 02.04.2020
Patent
Multi-Station Chamber Lid With Precise Temperature And Flow Control
Baluja, Sanjeev, Rice, Michael, Krishna, Gopu, Kashyap, Dhritiman Subha
Year of Publication 02.04.2020
Get full text
Year of Publication 02.04.2020
Patent
UNIVERSAL ADJUSTABLE BLOCKER PLATE FOR FLOW DISTRIBUTION TUNING
BANSAL, Amit Kumar, ZHANG, Yuxing, BALUJA, Sanjeev, KRISHNA, Gopu, NGUYEN, Tuan Anh, ULAVI, Tejas
Year of Publication 27.05.2021
Get full text
Year of Publication 27.05.2021
Patent
UNIVERSAL ADJUSTABLE BLOCKER PLATE FOR FLOW DISTRIBUTION TUNING
BANSAL, Amit Kumar, ZHANG, Yuxing, BALUJA, Sanjeev, KRISHNA, Gopu, NGUYEN, Tuan Anh, ULAVI, Tejas
Year of Publication 27.11.2020
Get full text
Year of Publication 27.11.2020
Patent
Multi-station chamber lid with precise temperature and flow control
RICE, MICHAEL, KASHYAP, DHRITIMAN SUBHA, KRISHNA, GOPU, BALUJA, SANJEEV
Year of Publication 11.08.2023
Get full text
Year of Publication 11.08.2023
Patent
Multi-station chamber lid with precise temperature and flow control
RICE, MICHAEL, KASHYAP, DHRITIMAN SUBHA, KRISHNA, GOPU, BALUJA, SANJEEV
Year of Publication 16.02.2023
Get full text
Year of Publication 16.02.2023
Patent