Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms
Bosetti, Gabriele, Bretthauer, Christian, Bogner, Andreas, Krenzer, Michael, Gierl, Karolina, Heiss, Heinrich, Schrag, Gabriele
Published in 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (07.04.2024)
Published in 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (07.04.2024)
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Conference Proceeding
Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation
Bosetti, Gabriele, Bretthauer, Christian, Steinberger, Michael, Gierl, Karolina, Krenzer, Michael, Schrag, Gabriele
Published in 2023 IEEE International Ultrasonics Symposium (IUS) (03.09.2023)
Published in 2023 IEEE International Ultrasonics Symposium (IUS) (03.09.2023)
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Conference Proceeding
A Novel High-SNR Full Bandwidth Piezoelectric MEMS Microphone Based on a Fully Clamped Aluminum Nitride Corrugated Membrane
Bosetti, Gabriele, Bretthauer, Christian, Bogner, Andreas, Krenzer, Michael, Gierl, Karolina, Timme, Hans-Joerg, Heiss, Heinrich, Schrag, Gabriele
Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
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Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
Conference Proceeding
Impact Of High Sc Content On Crystal Morphology And RF Performance Of Sputtered Al1-xScxN SMR BAW
Bogner, Andreas, Timme, Hans-Jorg, Bauder, Rudiger, Mutzbauer, Angelika, Pichler, Diana, Krenzer, Michael, Reccius, Christian, Weigel, Robert, Hagelauer, Amelie
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding