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"KRAUTSCHIK CHRISTOF"
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"KRAUTSCHIK CHRISTOF"
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Immersion lithography
by
Krautschik
,
Christof
Year of Publication
01.07.2004
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Cleaning organic residues from EUV optics and masks
by
KRAUTSCHIK CHRISTOF
G
,
ZIMMERMAN PAUL A
Year of Publication
01.07.2014
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Immersion lithography
by
Krautschik
,
Christof
Gabriel
Year of Publication
24.08.2004
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Immersion lithography
by
KRAUTSCHIK CHRISTOF
GABRIEL
Year of Publication
24.08.2004
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Reducing extreme ultraviolet flare in lithographic projection optics
by
KRAUTSCHIK CHRISTOF
,
LEE SANG H
Year of Publication
04.10.2007
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Immersion lithography
by
KRAUTSCHIK CHRISTOF
GABRIEL
Year of Publication
01.07.2004
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Patent
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Method and lens arrangement to improve imaging performance of microlithography exposure tool
by
KRAUTSCHIK
;
CHRISTOF
,
BORODOVSKY; YAN
Year of Publication
30.05.2000
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Enhancing light coupling efficiency for ultra high numerical aperture lithography through first order transmission optimization
by
Krautschik
,
Christof
,
Orczyk, Maciek
,
Urata, John
Year of Publication
26.08.2004
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Transition radiation apparatus
by
LEE SANG H
,
KRAUTSCHIK CHRISTOF
G
,
SHROFF YASHESH A
Year of Publication
08.05.2007
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Transition radiation apparatus
by
Lee, Sang H
,
Shroff, Yashesh A
,
Krautschik
,
Christof
G
Year of Publication
08.05.2007
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Transition radiation apparatus
by
LEE SANG H
,
KRAUTSCHIK CHRISTOF
G
,
SHROFF YASHESH A
Year of Publication
16.02.2006
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Enhancing light coupling efficiency for ultra high numerical aperture lithography through first order transmission optimization
by
KRAUTSCHIK CHRISTOF
GABRIEL
,
ORCZYK MACIEK E
,
URATA JOHN M
Year of Publication
26.08.2004
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