Formation of Nanosized Coatings in Hybrid Plasma Reactor Combining Magnetron or Arc Deposition with RF Plasma Assistance
Nekludova, Polina A., Kralkina, Elena A., Nikonov, Alexander M., Dyuzhev, Nikolay A., Airapetov, Alexandr A., Sologub, Vadim A.
Published in Materials science forum (01.07.2017)
Published in Materials science forum (01.07.2017)
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Journal Article
Plasma treatment for enhancement of the sorption capacity of carbon fabric
ZADIRIEV, Ilya, KRALKINA, Elena, SAMOILOV, Vladimir, ELCHANINOVA, Victoria, GORINA, Valentina, IVANENKO, Ilya, VAVILIN, Konstantin, NIKONOV, Alexander
Published in Plasma science & technology (01.12.2021)
Published in Plasma science & technology (01.12.2021)
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Journal Article
Experimental study of a low-pressure hybrid RF discharge
KRALKINA, Elena, NEKLIUDOVA, Polina, PAVLOV, Vladimir, VAVILIN, Konstantin, ZADIRIEV, Ilya, ZHAO, Chen
Published in Plasma science & technology (01.05.2020)
Published in Plasma science & technology (01.05.2020)
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Journal Article
Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources
Antonova, Tatjana, Bougrov, Gleb, Bougrova, Antonina, Choi, Won-Kook, Goncharov, Leonid, Jung, Hyung-Jin, Koh, Seoh-Keun, Kondranin, Sergey, Kralkina, Elena, Sitin, Evgeniy, Obukhov, Vladimir
Published in Japanese Journal of Applied Physics (01.12.1998)
Published in Japanese Journal of Applied Physics (01.12.1998)
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Journal Article
PLASMA SOURCE OF LINEAR BEAM IONS
BUGROV GLEB ELMIROVICH, KRALKINA ELENA ALEXANDROVNA, KONDRANIN SERGEI GENNADIEVICH, PAVLOV VLADIMIR BORISOVICH
Year of Publication 16.01.2002
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Year of Publication 16.01.2002
Patent
PLASMA ION SOURCE
VAVILIN, KONSTANTIN VIKTOROVICH, KOH, SEOK KEUN, KRALKINA, ELENA ALEXANDROVNA, PAVLOV, VLADIMIR BORISOVICH, LEE, CHEOL SU
Year of Publication 31.03.2011
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Year of Publication 31.03.2011
Patent
DEVICE FOR VACUUM-PLASMA DEPOSITION OF MATERIALS WITH ION STIMULATION
Kralkina Elena Aleksandrovna, Sologub Vadim Aleksandrovich, Ajrapetov Aleksandr Armenakovich, Vavilin Konstantin Viktorovich, Neklyudova Polina Alekseevna, Odinokov Vadim Vasilevich, Rashchinskij Vladimir Petrovich, Nikonov Aleksandr Mikhajlovich, Pavlov Georgij Yakovlevich, Pavlov Vladimir Borisovich, Biryukov Mikhail Georgievich
Year of Publication 21.03.2019
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Year of Publication 21.03.2019
Patent
REACTOR FOR PLASMA PROCESSING OF SEMICONDUCTOR STRUCTURES
Kralkina Elena Aleksandrovna, Sologub Vadim Aleksandrovich, Neklyudova Polina Alekseevna, Pavlov Georgij Yakovlevich, Guseva Natalya Borisovna, Petrov Aleksandr Kirillovich, Karpenkova Elena Vladimirovna, Ajrapetov Aleksandr Armenakovich, Vavilin Konstantin Viktorovich, Odinokov Vadim Vasilevich, Nikonov Aleksandr Mikhajlovich, Pavlov Vladimir Borisovich, Biryukov Mikhail Georgievich
Year of Publication 19.10.2018
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Year of Publication 19.10.2018
Patent
METHOD FOR PLASMA DEPOSITION OF POLYMER COATINGS
VAVILIN, KONSTANTIN V, KRALKINA, ELENA A, KONDRANIN, SERGEI G, BUGROV, GLEB E, PAVLOV, VLADIMIR B
Year of Publication 13.05.2004
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Year of Publication 13.05.2004
Patent
METHOD FOR PLASMA DEPOSITION OF POLYMER COATINGS
VAVILIN, KONSTANTIN V, KRALKINA, ELENA A, KONDRANIN, SERGEI G, BUGROV, GLEB E, PAVLOV, VLADIMIR B
Year of Publication 19.02.2004
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Year of Publication 19.02.2004
Patent
METHOD FOR PLASMA DEPOSITION OF POLYMER COATINGS
VAVILIN, KONSTANTIN V, KRALKINA, ELENA A, KONDRANIN, SERGEI G, BUGROV, GLEB E, PAVLOV, VLADIMIR B
Year of Publication 12.12.2002
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Year of Publication 12.12.2002
Patent
PLASMA ION SOURCE AND METHOD
KRALKINA, ELENA ALEXANDROVNA, PAVLOV, VLADIMIR BORISOVICH, BUGROV, GLEB ELMIROVICH, KONDRANIN, SERGEI GENNADIEVICH
Year of Publication 06.12.2001
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Year of Publication 06.12.2001
Patent