MICROLITHOGRAPHIC ILLUMINATION METHOD AS WELL AS A PROJECTION ILLUMINATION SYSTEM FOR CARRYING OUT THE METHOD
GOEHNERMEIER, AKSEL, KRAEHMER, DANIEL, SCHWAB, MARKUS, BROTSACK, MARKUS, GRUNER, TORALF, TOTZECK, MICHAEL, DIECKMANN, NILS, WANGLER, JOHANNES
Year of Publication 07.04.2005
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Year of Publication 07.04.2005
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Objective with fluoride crystal lenses
GRUNER TORALF, WAGNER CHRISTIAN, MAUL MANFRED, ULRICH WILHELM, BRUNOTTE MARTIN, KAISER WINFRIED, KRAEHMER DANIEL, ZACZEK CHRISTOF, GERHARD MICHAEL, ENKISCH BIRGIT
Year of Publication 05.12.2006
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Year of Publication 05.12.2006
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Objective with fluoride crystal lenses
GRUNER TORALF, WAGNER CHRISTIAN, MAUL MANFRED, ULRICH WILHELM, BRUNOTTE MARTIN, KAISER WINFRIED, KRAEHMER DANIEL, ZACZEK CHRISTOF, GERHARD MICHAEL, ENKISCH BIRGIT
Year of Publication 24.10.2006
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Year of Publication 24.10.2006
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OPTICAL SYSTEM WITH BIREFRINGENT OPTICAL ELEMENTS
KRAEHMER, DANIEL, DITTMAN, OLAF, FIOLKA, DAMIAN, TOTZECK, MICHAEL, DIECKMANN, NILS, GRUNER, TORALF, KOEHLER, JESS
Year of Publication 08.12.2004
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Year of Publication 08.12.2004
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MICROLITHOGRAPHY PROJECTION OBJECTIVE
GRUNER TORALF, DODOC AURELIAN, PERRIN JEAN CLAUDE, EPPLE ALEXANDER, KAMENOV VLADIMIR, KRAEHMER DANIEL, KALLER JULIAN, OKON THOMAS, FELDMANN HEIKO, CONRADI OLAF
Year of Publication 25.04.2008
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Year of Publication 25.04.2008
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Projection objective for microlithography, microlithography projection exposure apparatus with said projection objective, microlithographic manufacturing method for components, as well as a component
KAMENOV VLADIMIR, TOTZECK MICHAEL, KRAEHMER DANIEL, GOEHNERMEIER AKSEL
Year of Publication 31.03.2010
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Year of Publication 31.03.2010
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MICROLITHOGRAPHY PROJECTION OBJECTIVE
PERRIN, JEAN-CLAUDE, KRAEHMER, DANIEL, OKON, THOMAS, GRUNER, TORALF, FELDMANN, HEIKO, EPPLE, ALEXANDER, KAMENOV, VLADIMIR, KALLER, JULIAN, DODOC, AURELIAN, CONRADI, OLAF
Year of Publication 13.02.2008
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Year of Publication 13.02.2008
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Optisches System für die Mikrolithographie
KRAEHMER, DANIEL, ULRICH, WILHELM, MANGER, MATTHIAS, GELLRICH, BERNHARD
Year of Publication 26.11.2009
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Year of Publication 26.11.2009
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Microlithographic illumination method as well as a projection illumination system for carrying out the method
GOEHNERMEIER, AKSEL, KRAEHMER, DANIEL, SCHWAB, MARKUS, BROTSACK, MARKUS, GRUNER, TORALF, TOTZECK, MICHAEL, DIECKMANN, NILS, WANGLER, JOHANNES
Year of Publication 01.06.2012
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Year of Publication 01.06.2012
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Microlithographic illumination method as well as a projection illumination system for carrying out the method
GOEHNERMEIER, AKSEL, KRAEHMER, DANIEL, SCHWAB, MARKUS, BROTSACK, MARKUS, GRUNER, TORALF, TOTZECK, MICHAEL, DIECKMANN, NILS, WANGLER, JOHANNES
Year of Publication 16.04.2012
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Year of Publication 16.04.2012
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Illumination system for microlithography projection exposure system, has illumination optical unit that is designed so that each of the frames is illuminated with respect to illumination light with two states of polarization
KRAEHMER, DANIEL, SAENGER, INGO, ZIMMERMANN, JOERG, FIOLKA, DAMIAN, FREIMANN, ROLF, RUOFF, JOHANNES, MEIER, MARTIN, SCHLESENER, FRANK, HENNERKES, CHRISTOPH
Year of Publication 27.06.2013
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Year of Publication 27.06.2013
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Microlithographic illuminatin method as well as a
GOEHNERMEIER, AKSEL, KRAEHMER, DANIEL, SCHWAB, MARKUS, BROTSACK, MARKUS, GRUNER, TORALF, TOTZECK, MICHAEL, DIECKMANN, NILS, WANGLER, JOHANNES
Year of Publication 01.03.2012
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Year of Publication 01.03.2012
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OPTICAL SYSTEM WITH BIREFRINGENT OPTICAL ELEMENTS
KRAEHMER, DANIEL, DITTMAN, OLAF, FIOLKA, DAMIAN, TOTZECK, MICHAEL, DIECKMANN, NILS, GRUNER, TORALF, KOEHLER, JESS
Year of Publication 18.09.2003
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Year of Publication 18.09.2003
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Projection objective with obscurated pupil for microlithography
KRAEHMER, DANIEL, MANN, HANS-JUERGEN, GRUNER, TORALF, DODOC, AURELIAN
Year of Publication 16.05.2009
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Year of Publication 16.05.2009
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Microlithographic exposure method as well as a projection exposure system for carrying out the method
GRUNER TORALF, FIOLKA DAMIAN, SCHWAB MARKUS, WANGLER JOHANNES, TOTZECK MICHAEL, ZENZINGER MARKUS, KRAEHMER DANIEL, BROTSACK MARKUS, GOEHNERMEIER AKSEL, DIECKMANN NILS
Year of Publication 07.07.2005
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Year of Publication 07.07.2005
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