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"KOTSUGAI TATSUHIRO"
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가스 퍼지 유닛 및 로드 포트 장치
by
KOTSUGAI TATSUHIRO
,
EMOTO JUN
,
KUDO TAKUYA
Year of Publication
08.05.2023
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GAS PURGE UNIT AND THE LOAD PORT DEVICE
by
EMOTO, Jun
,
KOTSUGAI
,
Tatsuhiro
,
KUDO, Takuya
Year of Publication
14.04.2022
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WAFER TRANSPORT CONTAINER INTERIOR ATMOSPHERE MEASUREMENT DEVICE WAFER TRANSPORT CONTAINER WAFER TRANSPORT CONTAINER INTERIOR CLEANING DEVICE AND WAFER TRANSPORT CONTAINER INTERIOR CLEANING METHOD
by
KOTSUGAI TATSUHIRO
,
SASAKI MUTSUO
Year of Publication
21.06.2018
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SENSOR BUILT-IN FILTER STRUCTURE AND WAFER ACCOMMODATION CONTAINER
by
KOTSUGAI TATSUHIRO
,
KAGAYA TAKESHI
,
MIYAJIMA TOSHIHIKO
Year of Publication
07.02.2020
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LOAD PORT APPARATUS SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF CONTROLLING ATMOSPHERE IN POD
by
KOTSUGAI TATSUHIRO
,
KAGAYA TAKESHI
,
MIYAJIMA TOSHIHIKO
Year of Publication
07.02.2020
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Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method
by
Sasaki, Mutsuo
,
Kotsugai
,
Tatsuhiro
Year of Publication
05.10.2021
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GAS PURGE UNIT AND THE LOAD PORT DEVICE
by
EMOTO, Jun
,
KOTSUGAI
,
Tatsuhiro
,
KUDO, Takuya
Year of Publication
28.12.2023
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Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod
by
Miyajima, Toshihiko
,
Kotsugai
,
Tatsuhiro
,
Kagaya, Takeshi
Year of Publication
06.12.2022
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Sensor built-in filter structure and wafer accommodation container
by
Miyajima, Toshihiko
,
Kotsugai
,
Tatsuhiro
,
Kagaya, Takeshi
Year of Publication
14.12.2021
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WAFER TRANSPORT CONTAINER INTERIOR ATMOSPHERE MEASUREMENT DEVICE, WAFER TRANSPORT CONTAINER, WAFER TRANSPORT CONTAINER INTERIOR CLEANING DEVICE, AND WAFER TRANSPORT CONTAINER INTERIOR CLEANING METHOD
by
KOTSUGAI
,
Tatsuhiro
,
SASAKI, Mutsuo
Year of Publication
14.06.2018
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SENSOR BUILT-IN FILTER STRUCTURE AND WAFER ACCOMMODATION CONTAINER
by
KAGAYA, Takeshi
,
MIYAJIMA, Toshihiko
,
KOTSUGAI
,
Tatsuhiro
Year of Publication
30.01.2020
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LOAD PORT APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF CONTROLLING ATMOSPHERE IN POD
by
KAGAYA, Takeshi
,
MIYAJIMA, Toshihiko
,
KOTSUGAI
,
Tatsuhiro
Year of Publication
30.01.2020
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Gas purge unit and loading port device
by
KOTSUGAI TATSUHIRO
,
EMOTO JUN
,
KUDO TAKUYA
Year of Publication
23.06.2023
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Wafer transport container and atmosphere measurement device in the wafer transport container, cleaning device and method
by
MUTSUO SASAKI
,
TATSUHIRO KOTSUGAI
Year of Publication
29.06.2018
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TWI702383B
by
MIYAJIMA, TOSHIHIKO
,
KAGAYA, TAKESHI
,
KOTSUGAI
,
TATSUHIRO
Year of Publication
21.08.2020
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TWI696232B
by
MIYAJIMA, TOSHIHIKO
,
KAGAYA, TAKESHI
,
KOTSUGAI
,
TATSUHIRO
Year of Publication
11.06.2020
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Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod
by
MIYAJIMA, TOSHIHIKO
,
KAGAYA, TAKESHI
,
KOTSUGAI
,
TATSUHIRO
Year of Publication
16.02.2020
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Sensor built-in filter structure and wafer accommodation container
by
MIYAJIMA, TOSHIHIKO
,
KAGAYA, TAKESHI
,
KOTSUGAI
,
TATSUHIRO
Year of Publication
16.02.2020
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