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Published in IEEE transactions on semiconductor manufacturing (01.05.2022)
Published in IEEE transactions on semiconductor manufacturing (01.05.2022)
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Year of Publication 25.09.2023
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Year of Publication 17.03.2022
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Year of Publication 23.12.2021
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Year of Publication 29.01.2021
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PVD APPARATUS FOR PVD DIELECTRIC DEPOSITION
LAVITSKY ILYA, SCHMIEDING RANDY, MILLER KEITH A, KOTHNUR PRASHANTH, NGUYEN THANH X
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DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF
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