음향 계측을 이용한 패턴화된 구조체의 특성화
KOTELYANSKII MICHAEL, MAIR ROBIN, MEHENDALE MANJUSHA, MUKUNDHAN PRIYA
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
Patent
A New In-Line Laser-Based Acoustic Technique for Pillar Bump Metrology
Murray, Todd W., Bakir, Andrew, Stobbe, David M., Kotelyanskii, Michael J., Mair, Robin A., Mehendale, Manjusha, Ru, Xueping, Cohen, Jonathan D., Schulberg, Michelle T., Mukundhan, Priya, Kryman, Timothy J.
Published in Journal of microelectronics and electronic packaging (01.04.2016)
Published in Journal of microelectronics and electronic packaging (01.04.2016)
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Journal Article
Characterization of patterned structures using acoustic metrology
Mehendale, Manjusha, Kotelyanskii, Michael, Mair, Robin, Mukundhan, Priya
Year of Publication 21.05.2024
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Year of Publication 21.05.2024
Patent
MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY
MEHENDALE, Manjusha, KOTELYANSKII, Michael J, ANTONELLI, George Andrew, MAIR, Robin A
Year of Publication 03.10.2024
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Year of Publication 03.10.2024
Patent
MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY
Mehendale, Manjusha, Mair, Robin A, Antonelli, George Andrew, Kotelyanskii, Michael J
Year of Publication 03.10.2024
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Year of Publication 03.10.2024
Patent
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
MEHENDALE, Manjusha, MUKUNDHAN, Priya, MAIR, Robin, KOTELYANSKII, Michael
Year of Publication 21.10.2021
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Year of Publication 21.10.2021
Patent
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
Mehendale, Manjusha, Kotelyanskii, Michael, Mair, Robin, Mukundhan, Priya
Year of Publication 14.10.2021
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Year of Publication 14.10.2021
Patent
A METHOD AND A SENSOR ADJUSTMENT MECHANISM FOR POSITION SENSITIVE DETECTION
MEHENDALE, Manjusha, ZHOU, Wei, MUKUNDHAN, Priya, COLGAN, Michael, KOTELYANSKII, Michael
Year of Publication 09.09.2020
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Year of Publication 09.09.2020
Patent
POSITION SENSITIVE DETECTION OPTIMIZATION
MEHENDALE, Manjusha, ZHOU, Wei, MUKUNDHAN, Priya, COLGAN, Michael, KOTELYANSKII, Michael
Year of Publication 27.09.2017
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Year of Publication 27.09.2017
Patent
Optical acoustic substrate assessment system and method
Kotelyanskii Michael, Murray Todd, Mair Robin, Mehendale Manjusha, Mukundhan Priya
Year of Publication 21.02.2017
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Year of Publication 21.02.2017
Patent
OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD
KOTELYANSKII MICHAEL, MAIR ROBIN, MURRAY TODD, MEHENDALE MANJUSHA, MUKUNDHAN PRIYA
Year of Publication 11.02.2016
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Year of Publication 11.02.2016
Patent
OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD
KOTELYANSKII, MICHAEL, MEHENDALE, MANJUSHA, MUKUNDHAN, PRIYA, MAIR, ROBIN, MURRAY, TODD
Year of Publication 29.10.2015
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Year of Publication 29.10.2015
Patent
Position sensitive detection optimization
KOTELYANSKII MICHAEL, MEHENDALE MANJUSHA, MUKUNDHAN PRIYA, COLGAN MICHAEL, ZHOU WEI
Year of Publication 22.09.2015
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Year of Publication 22.09.2015
Patent