A Biomimetic Approach for Hierarchically Structured Inorganic Crystals through Self-Organization
Imai, Hiroaki, Oaki, Yuya, Kotachi, Akiko
Published in Bulletin of the Chemical Society of Japan (01.12.2006)
Published in Bulletin of the Chemical Society of Japan (01.12.2006)
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A NOVEL POLYMER FOR A 193-nm RESIST
NOZAKI, KOJI, WATANABE, KEIJI, YANO, EI, KOTACHI, AKIKO, TAKECHI, SATOSHI, HANYU, ISAMU
Published in Journal of Photopolymer Science and Technology (1996)
Published in Journal of Photopolymer Science and Technology (1996)
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Journal Article
CHEMICALLY AMPLIFIED RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
JANO, EI, IKIRASHI, MIWA, TAKAHASHI, MAKOTO, TAKECHI, SATOSHI, KURAMITSU, YOKO, WATANABE, KEIJI, NAMIKI, TAKAHISA, KOTACHI, AKIKO, NOJAKI, KOJI
Year of Publication 01.07.1999
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Year of Publication 01.07.1999
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