가스 펄싱 기반 공유 전구체 분배 시스템 및 사용 방법들
BRASHEAR KEVIN, XU MING, LE KENNETH, BALUJA SANJEEV, OKADA ASHLEY M, RICE MICHAEL, JOSEPHSON MARCEL E, FERNANDEZ ALEXANDER, KOSHTI SUSHANT SURESH, AUBUCHON JOSEPH
Year of Publication 11.12.2020
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Year of Publication 11.12.2020
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Gas-pulsing-based shared precursor distribution system and methods of use
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Year of Publication 06.12.2022
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Year of Publication 06.12.2022
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Gas-Pulsing-Based Shared Precursor Distribution System And Methods Of Use
Brashear, Kevin M, AuBuchon, Joseph, Baluja, Sanjeev, Fernandez, Alexander, Xu, Ming, Josephson, Marcel E, Rice, Michael, Koshti, Sushant Suresh, Okada, Ashley M, Le, Kenneth
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
Patent
Gas-Pulsing-Based Shared Precursor Distribution System and Methods of Use
Brashear, Kevin M, AuBuchon, Joseph, Baluja, Sanjeev, Fernandez, Alexander, Xu, Ming, Josephson, Marcel E, Rice, Michael, Koshti, Sushant Suresh, Okada, Ashley M, Le, Kenneth
Year of Publication 31.10.2019
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Year of Publication 31.10.2019
Patent
Gas-pulsing-based shared precursor distribution system and methods of use
AUBUCHON, JOSEPH, JOSEPHSON, MARCEL E, RICE, MICHAEL, KOSHTI, SUSHANT SURESH, LE, KENNETH, XU, MING, FERNANDEZ, ALEXANDER, OKADA, ASHLEY M, BRASHEAR, KEVIN M, BALUJA, SANJEEV
Year of Publication 16.02.2024
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Year of Publication 16.02.2024
Patent
Gas-pulsing-based shared precursor distribution system and methods of use
AUBUCHON, JOSEPH, JOSEPHSON, MARCEL E, RICE, MICHAEL, KOSHTI, SUSHANT SURESH, LE, KENNETH, XU, MING, FERNANDEZ, ALEXANDER, OKADA, ASHLEY M, BRASHEAR, KEVIN M, BALUJA, SANJEEV
Year of Publication 11.11.2023
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Year of Publication 11.11.2023
Patent
Gas-pulsing-based shared precursor distribution system and methods of use
AUBUCHON, JOSEPH, JOSEPHSON, MARCEL E, RICE, MICHAEL, KOSHTI, SUSHANT SURESH, LE, KENNETH, XU, MING, FERNANDEZ, ALEXANDER, OKADA, ASHLEY M, BRASHEAR, KEVIN M, BALUJA, SANJEEV
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
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