중복성을 갖는 팩토리 인터페이스
REUTER PAUL BENJAMIN, HUDGENS JEFFREY C, IKEDA KRISTEN, KOSHTI SUSHANT S
Year of Publication 19.04.2024
Get full text
Year of Publication 19.04.2024
Patent
SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTERFACE FOOTPRINT SPACE
ASSAF SHAY, NEWMAN JACOB, RICE MICHAEL R, KOSHTI SUSHANT S, CONSTANT ANDREW J, REUTER PAUL B
Year of Publication 11.01.2024
Get full text
Year of Publication 11.01.2024
Patent
로드락들을 팩토리 인터페이스 풋프린트 공간 내에 통합하기 위한 시스템들 및 방법들
ASSAF SHAY, NEWMAN JACOB, RICE MICHAEL R, KOSHTI SUSHANT S, CONSTANT ANDREW J, REUTER PAUL B
Year of Publication 16.02.2023
Get full text
Year of Publication 16.02.2023
Patent
팩토리 인터페이스를 위한 단축된 로드 포트
RAMACHANDRAIAH ARUNKUMAR, HOLEYANNAVAR DEVENDRA CHANNAPPA, RAMACHANDRAN NARAYANAN, GOPALAKRISHNA SRINIVAS POSHATRAHALLI, BAUMGARTEN DOUGLAS B, KOSHTI SUSHANT S, REUTER PAUL B
Year of Publication 24.10.2023
Get full text
Year of Publication 24.10.2023
Patent
배치 웨이퍼 탈기 챔버, 및 팩토리 인터페이스 및 진공 기반 메인프레임으로의 통합
CHACIN JUAN, MERRY NIR, MAZZOCCO JOHN JOSEPH, RADKO MAREK, KOSHTI SUSHANT S, HRUZEK DEAN C, REUTER PAUL B, SANSONI STEVEN
Year of Publication 20.02.2023
Get full text
Year of Publication 20.02.2023
Patent
감소된 풋프린트를 갖는 반도체 프로세싱 툴 플랫폼 구성
MERRY NIR, CHU SCHUBERT S, LEE SONGJAE, MYO NYI OO, KOSHTI SUSHANT S, KUCHAR MICHAEL C
Year of Publication 09.08.2022
Get full text
Year of Publication 09.08.2022
Patent
통합된 로드록들과 함께 사용 가능한 팩토리 인터페이스 로봇들
ASSAF SHAY, RAMACHANDRAIAH ARUNKUMAR, NEWMAN JACOB, HOLEYANNAVAR DEVENDRA CHANNAPPA, RAMACHANDRAN NARAYANAN, GOPALAKRISHNA SRINIVAS POSHATRAHALLI, BAUMGARTEN DOUGLAS B, KOSHTI SUSHANT S, RICE MICHAEL R, CONSTANT ANDREW J, PHILLIPS DAVID, REUTER PAUL B
Year of Publication 28.05.2024
Get full text
Year of Publication 28.05.2024
Patent
열-기반 질량 유량 제어기(MFC)들의 향상된 유동 검출 반복성을 위한 방법들 및 장치
XU MING, BABAYAN STEVEN E, KOSHTI SUSHANT S, RICE MICHAEL R, SUN JENNIFER Y
Year of Publication 05.08.2019
Get full text
Year of Publication 05.08.2019
Patent
가스 펄싱 기반 공유 전구체 분배 시스템 및 사용 방법들
BRASHEAR KEVIN, XU MING, LE KENNETH, BALUJA SANJEEV, OKADA ASHLEY M, RICE MICHAEL, JOSEPHSON MARCEL E, FERNANDEZ ALEXANDER, KOSHTI SUSHANT SURESH, AUBUCHON JOSEPH
Year of Publication 11.12.2020
Get full text
Year of Publication 11.12.2020
Patent
TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR DEVICE MANUFACTURING PROCESSING TOOLS, AND PROCESSING METHODS
KANKANALA PENCHALA N, RICE MICHAEL ROBERT, MEYERS MICHAEL, MAZZOCCO JOHN J, KOSHTI SUSHANT S, HRUZEK DEAN C, KUCHAR MICHAEL, ENGLHARDT ERIC A
Year of Publication 11.07.2016
Get full text
Year of Publication 11.07.2016
Patent
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED FOOTPRINT
Merry, Nir, Kuchar, Michael C, Myo, Nyi Oo, Chu, Schubert S, Koshti, Sushant S, Lee, Songjae
Year of Publication 01.08.2024
Get full text
Year of Publication 01.08.2024
Patent
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING REPLACEABLE CHAMBER PORTS
SICO, Angela Rose, MOREY, Travis, KUCHAR, Michael C, KOSHTI, Sushant S
Year of Publication 27.06.2024
Get full text
Year of Publication 27.06.2024
Patent