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Year of Publication 16.08.2023
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OPTIMIZING EDGE RADICAL FLUX IN A DOWNSTREAM PLASMA CHAMBER
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Year of Publication 23.06.2022
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SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION
Zhu, Ji, Kosche, Serge, Kawaguchi, Mark, Angelov, lvelin, Kumar, Jatinder
Year of Publication 14.02.2019
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Year of Publication 14.02.2019
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SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION
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Year of Publication 14.02.2019
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Year of Publication 14.02.2019
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Optimizing edge radical flux in a downstream plasma chamber
KOSCHE, SERGE, PARK, PIL-YEON, KAWAGUCHI, MARK, KON, SHIHUNG, BRAVO, ANDREW STRATTON, WHITTEN, STEPHEN, MONBEIG, JULIEN AUGUSTIN
Year of Publication 01.10.2022
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Year of Publication 01.10.2022
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