POLISHING HEAD, AND WAFER POLISHING APPARATUS, AND POLISHING METHOD USING THE SAME
KOSASA KAZUAKI, SUGIMORI KATSUHISA, KAJIWARA JIRO, KIHARA YOSHIYUKI, TERAKAWA YOSHINARI, YAMAMOTO KATSUTOSHI, NAKANO YUKI
Year of Publication 21.11.2019
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Year of Publication 21.11.2019
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SINGLE-SIDED POLISHING METHOD FOR SILICON WAFER
KOSASA KAZUAKI, SUGIMORI KATSUHISA, NAKAJIMA TOSHIHARU, KOBUCHI SHUNYA
Year of Publication 10.08.2017
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Year of Publication 10.08.2017
Patent