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METHOD FOR INTEGRATED CIRCUIT FABRICATION INCLUDING LINEWIDTH CONTROL DURING ETCHING
by
KOOK, TAEHO
,
OLASUPO, KOLAWOLE RAHMAN
,
KORNBILT
,
AVINOAM
Year of Publication
25.10.1995
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Method for integrated circuit fabrication including linewidth control during etching
by
KOOK, TAEHO
,
OLASUPO, KOLAWOLE RAHMAN
,
KORNBILT
,
AVINOAM
Year of Publication
06.07.1994
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apparatus specially adapted therefor
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