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Year of Publication 30.08.2012
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Year of Publication 30.08.2017
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Year of Publication 31.12.2013
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Year of Publication 17.11.2011
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 10.06.2015
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Year of Publication 10.06.2015
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 01.04.2014
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Year of Publication 01.04.2014
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Year of Publication 27.09.2012
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Year of Publication 10.09.2012
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Year of Publication 10.09.2012
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 29.08.2012
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Year of Publication 29.08.2012
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ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
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Year of Publication 23.08.2012
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Year of Publication 23.08.2012
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 01.10.2014
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 16.12.2012
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Year of Publication 16.12.2012
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Electromagnetic actuator, stage apparatus and lithographic apparatus
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Year of Publication 22.08.2012
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Year of Publication 22.08.2012
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