계측 툴 교정 방법 및 연관된 계측 툴
KOOLEN ARMAND EUGENE ALBERT, GOORDEN SEBASTIANUS ADRIANUS, LIM HUI QUAN, LIAN JIN
Year of Publication 21.12.2023
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Year of Publication 21.12.2023
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계측 방법 및 장치
KOOLEN ARMAND EUGENE ALBERT, COENE WILLEM MARIE JULIA MARCEL, DEN BOEF ARIE JEFFREY, TUKKER TEUNIS WILLEM, KONIJNENBERG ALEXANDER PRASETYA
Year of Publication 17.05.2024
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Year of Publication 17.05.2024
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계측 방법 및 디바이스
SHMAREV YEVGENIY KONSTANTINOVICH, KOOLEN ARMAND EUGENE ALBERT, PANDEY NITESH
Year of Publication 21.04.2020
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Year of Publication 21.04.2020
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메트롤로지 방법 및 관련 장치
KOOLEN ARMAND EUGENE ALBERT, GOORDEN SEBASTIANUS ADRIANUS, JEON SERA, MATHIJSSEN SIMON GIJSBERT JOSEPHUS, BHATTACHARYYA KAUSTUVE, LIN SHUO CHUN, DAVIS TIMOTHY DUGAN
Year of Publication 31.07.2023
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Year of Publication 31.07.2023
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메트롤로지 방법, 장치 및 컴퓨터 프로그램
KOOLEN ARMAND EUGENE ALBERT, HASTINGS SIMON PHILIP SPENCER, TARABRIN SERGEY
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
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METROLOGY SYSTEM AND METHOD FOR DETERMINING A CHARACTERISTIC OF ONE OR MORE STRUCTURES ON A SUBSTRATE
KOOLEN ARMAND EUGENE ALBERT, COENE WILLEM MARIE JULIA MARCEL, TENNER VASCO TOMAS, DEN BOEF ARIE JEFFREY, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, WARNAAR PATRICK, PANDEY NITESH
Year of Publication 22.06.2022
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Year of Publication 22.06.2022
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이미지를 필터링하기 위한 방법 및 연관된 계측 장치
KOOLEN ARMAND EUGENE ALBERT, TENNER VASCO TOMAS, CRAMER HUGO AUGUSTINUS JOSEPH, KREUZER JUSTIN LLOYD, WARNAAR PATRICK, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, MEHTA NIKHIL
Year of Publication 14.04.2022
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Year of Publication 14.04.2022
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리소그래피 공정의 매개변수 측정 방법
KOOLEN ARMAND EUGENE ALBERT, KOOP ERIK JOHAN, DEN BOEF ARIE JEFFREY, CRAMER HUGO AUGUSTINUS JOSEPH, POLO ALESSANDRO, NIENHUYS HAN KWANG, LIAN JIN, BOS HILKO DIRK
Year of Publication 01.07.2021
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Year of Publication 01.07.2021
Patent
파면의 가변 정정기
KOOLEN ARMAND EUGENE ALBERT, DE WIT JOHANNES MATHEUS MARIE, TUKKER TEUNIS WILLEM, SMIRNOV STANISLAV
Year of Publication 02.04.2019
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Year of Publication 02.04.2019
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타겟 배열을 포함하는 기판, 및 연관된 적어도 하나의 패터닝 디바이스, 리소그래피 방법 및 계측 방법
KOOLEN ARMAND EUGENE ALBERT, VAN BUEL HENRICUS WILHELMUS MARIA, AL ARIF S. M. MASUDUR RAHMAN, GOORDEN SEBASTIANUS ADRIANUS, VAN DER LAAN HANS, BHATTACHARYYA KAUSTUVE, LIM HUI QUAN, VAN DER SCHAAR MAURITS, ZWIER OLGER VICTOR, LIAN JIN, BOS HILKO DIRK, CALADO VICTOR EMANUEL
Year of Publication 09.12.2022
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Year of Publication 09.12.2022
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검사 시스템에서의 포커싱을 위한 디바이스 및 방법
SHMAREV YEVGENIY KONSTANTINOVICH, KOOLEN ARMAND EUGENE ALBERT, TSENG CHIEN HUNG, SMIRNOV STANISLAV
Year of Publication 31.08.2018
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Year of Publication 31.08.2018
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계측 장치로부터의 조명 특성을 모니터링하기 위한 방법
KOOLEN ARMAND EUGENE ALBERT, CRAMER HUGO AUGUSTINUS JOSEPH, FAGGINGER AUER BASTIAAN ONNE, SCHMETZ SCHAGEN JOLANDA THEODORA JOSEPHINA
Year of Publication 02.08.2019
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Year of Publication 02.08.2019
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계측 방법 및 장치, 컴퓨터 프로그램 및 리소그래피 시스템
KOOLEN ARMAND EUGENE ALBERT, PANDEY NITESH, ZHOU ZILI, VAN DER ZOUW GERBRAND
Year of Publication 05.06.2018
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Year of Publication 05.06.2018
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이미지 평면 검출 기술을 이용하여 관심 대상 매개변수를 측정하기 위한 방법 및 장치
DEN BOEF ARIE JEFFREY, CRAMER HUGO AUGUSTINUS JOSEPH, FAGGINGER AUER BASTIAAN ONNE, VAN KRAAIJ MARKUS GERARDUS MARTINUS MARIA, ZHOU ZILI, VERMA ALOK, KOOLEN ARMAND EUGENE ALBERT, TSIATMAS ANAGNOSTIS, WANG SHU JIN, HINNEN PAUL CHRISTIAAN, VAN WEERT MARTINUS HUBERTUS MARIA, PANDEY NITESH, VAN DER ZOUW GERBRAND
Year of Publication 29.09.2020
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Year of Publication 29.09.2020
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