SENSOR LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KOOIKER EELCO, WESTERLAKEN JAN STEVEN CHRISTIAAN, HURKENS MERTENS WILHELMINA MARGARETA JOZEF, VAN DE WAL JOHANNES, JACOBS JOHANNES HENRICUS WILHELMUS, KNARREN BASTIAAN, TEILLET YOHANN BRUNO YVON, VAN DE VIJVER YURI, VOOGD ROBBERT JAN, KOK HAICO, LAURENT THIBAULT, VAN DE RIJDT HANS
Year of Publication 23.12.2016
Get full text
Year of Publication 23.12.2016
Patent
Encoder, position measurement system and lithographic apparatus
MR. JAN PETER BAARTMAN, WOUTER PRIL, BRYAN TONG-MINH, EELCO KOOIKER, SUZANNE COSIJNS
Year of Publication 20.09.2016
Get full text
Year of Publication 20.09.2016
Patent
Stage apparatus suitable for a particle beam apparatus
Van Der Toorn, Jan-Gerard Cornelis, Severt, Han Willem Hendrik, Kooiker, Allard Eelco, Van Der Wilk, Ronald
Year of Publication 20.02.2024
Get full text
Year of Publication 20.02.2024
Patent
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KOOIKER EELCO, WESTERLAKEN JAN STEVEN CHRISTIAAN, VIJVER YURI, HURKENS-MERTENS WILHELMINA MARGARETA JOZEF, JACOBS JOHANNES HENRICUS WILHELMUS, KNARREN BASTIAAN, TEILLET YOHANN BRUNO YVON, VOOGD ROBBERT JAN, KOK HAICO, WAL JOHANNES, RIJDT HANS, LAURENT THIBAULT
Year of Publication 25.11.2013
Get full text
Year of Publication 25.11.2013
Patent
Sensor, lithographic apparatus and device manufacturing method
KOOIKER EELCO, WESTERLAKEN JAN STEVEN CHRISTIAAN, VAN DE WAL JOHANNES, HURKENS-MERTENS WILHELMINA MARGARETA JOZEF, JACOBS JOHANNES HENRICUS WILHELMUS, KNARREN BASTIAAN, TEILLET YOHANN BRUNO YVON, VAN DE VIJVER YURI, VOOGD ROBBERT JAN, KOK HAICO, LAURENT THIBAULT, VAN DE RIJDT HANS
Year of Publication 28.01.2015
Get full text
Year of Publication 28.01.2015
Patent
Object table comprising an electrostatic clamp
Huinck, Jeroen Gertruda Antonius, Van Der Toorn, Jan-Gerard Cornelis, Van Soest, Jurgen, Wellink, Arno Maria, Severt, Han Willem Hendrik, Liu, Shibing, Luo, Ying, Kooiker, Allard Eelco, Wang, Yixiang, Ronde, Michael Johannes Christiaan, Chen, Chia-Yao, Zhu, Bohang
Year of Publication 02.07.2024
Get full text
Year of Publication 02.07.2024
Patent
STAGE APPARATUS SUITABLE FOR A PARTICLE BEAM APPARATUS
SEVERT, Han, Willem, Hendrik, VAN DER TOORN, Jan-Gerard, Cornelis, KOOIKER, Allard, Eelco, VAN DER WILK, Ronald
Year of Publication 16.02.2022
Get full text
Year of Publication 16.02.2022
Patent
STAGE APPARATUS SUITABLE FOR A PARTICLE BEAM APPARATUS
SEVERT, Han Willem Hendrik, KOOIKER, Allard Eelco, VAN DER TOORN, Jan-Gerard Cornelis, VAN DER WILK, Ronald
Year of Publication 27.01.2022
Get full text
Year of Publication 27.01.2022
Patent
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
TEILLET, YOHANN, BRUNO, YVON, LAURENT, THIBAULT, KNARREN, BASTIAAN, HURKENS-MERTENS, WILHELMINA MARGARETA JOZEF, KOOIKER, EELCO, KOK, HAICO, VAN DE WAL, JOHANNES, WESTERLAKEN, JAN, STEVEN, CHRISTIAAN, VAN DE VIJVER, YURI, VOOGD, ROBBERT JAN, JACOBS, JOHANNES, HENRICUS, WILHELMUS, VAN DE RIJDT, HANS
Year of Publication 28.11.2013
Get full text
Year of Publication 28.11.2013
Patent
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
SEVERT, Han Willem Hendrik, VAN SOEST, Jurgen, KOOIKER, Allard Eelco, CHEN, Chia-Yao, VAN DER TOORN, Jan-Gerard Cornelis, HUINCK, Jeroen Gertruda Antonius, LIU, Shibing, RONDE, Michael Johannes Christiaan, WELLINK, Arno Maria, LUO, Ying, WANG, Yixiang, ZHU, Bohang
Year of Publication 03.08.2023
Get full text
Year of Publication 03.08.2023
Patent
Object table comprising an electrostatic clamp
Huinck, Jeroen Gertruda Antonius, Van Der Toorn, Jan-Gerard Cornelis, Van Soest, Jurgen, Wellink, Arno Maria, Severt, Han Willem Hendrik, Liu, Shibing, Luo, Ying, Kooiker, Allard Eelco, Wang, Yixiang, Ronde, Michaël Johannes Christiaan, Chen, Chia-Yao, Zhu, Bohang
Year of Publication 25.04.2023
Get full text
Year of Publication 25.04.2023
Patent
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
VAN GEND, Johan, GOSEN, Jeroen Gerard, KOOIKER, Allard Eelco, RONDE, Michaél Johannes Christiaan, VAN DE GROES, Henricus Martinus Johannes, ARORA, Sampann, KUINDERSMA, Lucas, DE VOS, Youssef Karel Maria, KEULEN, Luuc, VAN BANNING, Dennis Herman Caspar, PRIL, Wouter Onno
Year of Publication 29.06.2023
Get full text
Year of Publication 29.06.2023
Patent