Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material
Koo, Namil, Bender, Markus, Plachetka, Ulrich, Fuchs, Andreas, Wahlbrink, Thorsten, Bolten, Jens, Kurz, Heinrich
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
Conference Proceeding
Definition of 15nm half pitch grating structures by electron beam lithography double exposure techniques
Bolten, Jens, Koo, Namil, Wahlbrink, Thorsten, Kurz, Heinrich
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Journal Article
The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography
Koo, Namil, Plachetka, Ulrich, Otto, Martin, Bolten, Jens, Jeong, Jun-ho, Lee, Eung-sug, Kurz, Heinrich
Published in Nanotechnology (04.06.2008)
Published in Nanotechnology (04.06.2008)
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Journal Article
TIME-DOMAIN SPECTROSCOPIC APPARATUS FOR ANALYZING SEMICONDUCTOR DEVICE
BAEK INKEUN, PARK JUNBUM, PARK SUHWAN, JEON IKSEON, KOO NAMIL, YOON JONGMIN
Year of Publication 07.06.2022
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Year of Publication 07.06.2022
Patent
Fabrication of MOSFETs by 3D soft UV-nanoimprint
Koo, Namil, Schmidt, Mathias, Mollenhauer, Thomas, Moormann, Christian, Schlachter, Florian, Kurz, Heinrich
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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Journal Article
Improved CD control and line edge roughness in E-beam lithography through combining proximity effect correction with gray scale techniques
Bolten, Jens, Wahlbrink, Thorsten, Koo, Namil, Kurz, Heinrich, Stammberger, Stefan, Hofmann, Uli, Ünal, Nezih
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Journal Article
Conference Proceeding
The fabrication of a flexible mold for highresolution soft ultraviolet nanoimprint lithography
Koo, Namil, Plachetka, Ulrich, Otto, Martin, Bolten, Jens, Jeong, Jun-ho, Lee, Eung-sug, Kurz, Heinrich
Published in Nanotechnology (04.06.2008)
Published in Nanotechnology (04.06.2008)
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Journal Article
METHOD OF EXTRACTING PROPERTIES OF A LAYER ON A WAFER
JEON, Ikseon, JUN, Sunhong, BAEK, Inkeun, PARK, Junbum, PARK, Suhwan, KIM, Ingi, KIM, Jaeho, KOO, Namil
Year of Publication 11.07.2024
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Year of Publication 11.07.2024
Patent
METHOD OF EXTRACTING PROPERTIES OF A LAYER ON A WAFER
JEON, Ikseon, JUN, Sunhong, BAEK, Inkeun, PARK, Junbum, PARK, Suhwan, KIM, Ingi, KIM, Jaeho, KOO, Namil
Year of Publication 25.04.2024
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Year of Publication 25.04.2024
Patent