CHEMICAL MECHANICAL POLISHING DEVICE FOR DETECTING A POLISHING END POINT BY THE CURRENT CHANGE OF A MOTOR AND AN OPTICAL SYSTEM OR DETECTING THE CHANGE OF TEMPERATURE DURING POLISHING
SON, HONG SEONG, KOO, JAE UNG, LEE, SUNG BAE, HONG, DUK HO, LEE, JONG WON, HAH, SANG ROK
Year of Publication 10.03.2005
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Year of Publication 10.03.2005
Patent