Substrate processing apparatus equipped with hot hole
CHOI JAE-WOOK, KIM SANG-BO, KONG HAN-YEONG, LEE BAEK-JOO, KIM SU-WOONG, MOON SANG YUN, HWANG JAE-SOON, CHOI SEUNG-DAE, SEO DONG-WON
Year of Publication 21.06.2022
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Year of Publication 21.06.2022
Patent
Substrate processing apparatus equipped with radical part
CHOI JAE-WOOK, KANG DONG-SEOK, KIM SANG-BO, KONG HAN-YEONG, LEE BAEK-JOO, MOON SANG YUN, LEE JIN HWAN, KIM SU-WOONG, LI KUIFAN, SEO DONG-WON
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
Patent