METHODS FOR ASSESSING SEMICONDUCTOR STRUCTURES
LIBBERT JEFFREY L, WANG GANG, KOMMU SRIKANTH, PEIDOUS IGOR, RAPOPORT IGOR
Year of Publication 27.12.2021
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Year of Publication 27.12.2021
Patent
반도체 구조들을 평가하기 위한 방법들
LIBBERT JEFFREY L, WANG GANG, KOMMU SRIKANTH, PEIDOUS IGOR, RAPOPORT IGOR
Year of Publication 14.10.2019
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Year of Publication 14.10.2019
Patent
SEMICONDUCTOR ON INSULATOR STRUCTURE COMPRISING A BURIED HIGH RESISTIVITY LAYER
Jones, Andrew M, Kommu, Srikanth, Mendez, Horacio Josue, Peidous, Igor
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
Patent
High-Volume Single-Wafer Reactors for Silicon Epitaxy
Kommu, Srikanth, Khomami, Bamin
Published in Industrial & engineering chemistry research (20.02.2002)
Published in Industrial & engineering chemistry research (20.02.2002)
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Journal Article
Semiconductor on insulator structure comprising a buried high resistivity layer
Jones, Andrew M, Kommu, Srikanth, Mendez, Horacio Josue, Peidous, Igor
Year of Publication 22.11.2022
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Year of Publication 22.11.2022
Patent
SUSCEPTOR FOR IMPROVING THROUGHPUT AND REDUCING WAFER DAMAGE
KOMMU SRIKANTH, TORACK THOMAS A, HELLWIG LANCE G, PITNEY JOHN A, HAMANO MANABU
Year of Publication 17.03.2010
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Year of Publication 17.03.2010
Patent