Chemical-mechanical polishing of metalorganic chemical-vapor-deposited gold for LSI interconnection
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Published in Japanese Journal of Applied Physics (01.03.1993)
Published in Japanese Journal of Applied Physics (01.03.1993)
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Metalorganic Vapor Phase Epitaxial Growth for High Electron Mobility Transistor LSIs
OHORI, T, TOMESAKAI, N, SUZUKI, M, KASAI, K, KOMENO, J
Published in Japanese Journal of Applied Physics (01.07.1992)
Published in Japanese Journal of Applied Physics (01.07.1992)
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Atomic structure of ordered InGaP crystals grown on (001)GaAs substrates by metalorganic chemical vapor deposition
UEDA, O, TAKIKAWA, M, KOMENO, J, UMEBU, I
Published in Japanese Journal of Applied Physics (01.11.1987)
Published in Japanese Journal of Applied Physics (01.11.1987)
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Warp Reduction of High-Electron-Mobility-Transistor on Si Wafer by In-Doped Selectively Doped Heterostructure and Strained-Layer Superlattice Buffer Layer
Ohori, Tatsuya, Suehiro, Haruyoshi, Kazumi Kasai, Kazumi Kasai, Junji Komeno, Junji Komeno
Published in Japanese Journal of Applied Physics (1994)
Published in Japanese Journal of Applied Physics (1994)
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CHEMICAL VAPOR DEPOSITION DEVICE
OISHI TAKAHIRO, SUDA NOBORU, HUANG TSAN-HUA, SHIEH SHIH-YUNG, KOMENO JUNJI
Year of Publication 19.07.2018
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Year of Publication 19.07.2018
Patent
Novel pseudomorphic structure on Si substrate grown by metalorganic vapor phase epitaxy
Ohori, Tatsuya, Eshita, Takashi, Miyagaki, Shinji, Kasai, Kazumi, Komeno, Junji
Published in Journal of crystal growth (01.12.1994)
Published in Journal of crystal growth (01.12.1994)
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Conference Proceeding
VAPOR-PHASE FILM DEPOSITION APPARATUS
OISHI TAKAHIRO, SUDA NOBORU, SHIEH SHIH-YUNG, CHUNG BUIN, KOMENO JUNJI, LU POING
Year of Publication 20.04.2015
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Year of Publication 20.04.2015
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MOVPE growth of selectively doped AlGaAs/GaAs heterostructures with tertiarybutylarsine
TANAKA, H, KIKKAWA, T, KASAI, K, KOMENO, J
Published in Japanese Journal of Applied Physics (01.06.1989)
Published in Japanese Journal of Applied Physics (01.06.1989)
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Multi-wafer growth of HEMT LSI quality AlGaAs/GaAs heterostructures by MOCVD
TANAKA, H, ITOH, H, O'HORI, T, TAKIKAWA, M, KASAI, K, TAKECHI, M, SUZUKI, M, KOMENO, J
Published in Japanese Journal of Applied Physics (01.09.1987)
Published in Japanese Journal of Applied Physics (01.09.1987)
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MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSI
Itoh, Hiromi, Tanaka, Hitoshi, Ohori, Tatsuya, Kasai, Kazumi, Mitani, Eizo, Suzuki, Masahisa, Komeno, Junji
Published in Japanese Journal of Applied Physics (01.10.1989)
Published in Japanese Journal of Applied Physics (01.10.1989)
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Large-area MOVPE growth of AlGaAs/GaAs heterostructures for HEMT LSIs
TANAKA, H, TOMESAKAI, N, ITOH, H, OHORI, T, MAKIYAMA, K, OKABE, T, TAKIKAWA, M, KASAI, K, KOMENO, J
Published in Japanese Journal of Applied Physics (1990)
Published in Japanese Journal of Applied Physics (1990)
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