Study of the cross contamination effect on post CMP in situ cleaning process
Kim, Hong Jin, Bohra, Girish, Yang, Hyucksoo, Ahn, Si-Gyung, Qin, Liqiao, Koli, Dinesh
Published in Microelectronic engineering (25.03.2015)
Published in Microelectronic engineering (25.03.2015)
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Journal Article
Advanced Process Control for Variability Control in Chemical Mechanical Polishing Process
Koli, Dinesh R, Wan Hsiang Liang, Rachel, Kim, Hong Jin, Solan, Robert
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
The Role of Polysilicon Slurry and Its Application in 7nm CMP
Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in ECS transactions (26.04.2017)
Published in ECS transactions (26.04.2017)
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Journal Article
CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology
Tsai, Stan, Amanapu, Hari, Xie, Ruilong, Zhang, John, Chung, Kisup, Labelle, Cathy, Huang, Haigou, Han, Ja-Hyung, Koli, Dinesh R, Surisetty, Charan
Published in ECS transactions (25.04.2017)
Published in ECS transactions (25.04.2017)
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Journal Article
Study on the Polishing Performance of Silicon Carbonitride (SiCN)
Qin, Liqiao, Gu, Sipeng, Kim, Hong Jin, Han, Ja-Hyung, Koli, Dinesh R
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
Formation of Cobalt-BTA Complexes and Their Removal from Various Surfaces Relevant to Cobalt Interconnect Applications
Seo, Jihoon, Vegi, S. S. R. K. Hanup, Ranaweera, C. K., Baradanahalli, N. K., Han, Ja-Hyung, Koli, Dinesh, Babu, S. V.
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Cobalt CMP Development for 7nm Logic Device
Wu, Changhong, Han, Ja-Hyung, Shi, Xingzhao, Koli, Dinesh R, Penigalapati, Dinesh
Published in ECS transactions (26.04.2017)
Published in ECS transactions (26.04.2017)
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Journal Article
Effect of Reactive Ion Etch on the Polishing Selectivity during Silicon Nitride Chemical Mechanical Polishing for Sub-10 nm Logic Device
Han, Jahyung, Shi, Xingzhao, Wu, Changhong, Koli, Dinesh, Kim, Hong Jin
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
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Journal Article
Noise and Vibration Emissions of Railway Bridges
Shiva, Anubhav, Purohit, Rajesh, Rana, R.S., Koli, Dinesh Kumar
Published in Materials today : proceedings (2017)
Published in Materials today : proceedings (2017)
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Journal Article
Design and Finite Element Analysis of an Automotive Clutch Assembly
Purohit, Rajesh, Khitoliya, Pooja, Koli, Dinesh Kumar
Published in Procedia materials science (2014)
Published in Procedia materials science (2014)
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Journal Article
Study of sol-gel type ceria particle for CMP process in leading-edge CMOS device: YE: Yield enhancement/learning
Penigalapati, Dinesh Kumar, Yang, Ji Chul, Jha, Amarnath, Chao, Tai Fong, Koli, Dinesh
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
Defect improvement by optimizing electroplating in BEOL sub-50nm pitch
Ahmed, Shafaat, Shah, Ketan, Cheng, Tien-Jen, da Silva, Adam, Sharma, Mukta, Lin, Teng-Yin, Koli, Dinesh, Mahalingam, Anbu Selvam K M, Grunow, Stephan, Child, Craig
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
Data-driven surrogate model for etch rate profiles using sensor data from a reactive ion etcher
Pamarty, Abhijit Pranav, Neuweiler, Robert, Do, Le Quyen, Johnson, Keaton, Sanchez, James J, Koli, Dinesh
Year of Publication 19.09.2024
Year of Publication 19.09.2024
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Journal Article