개선된 리소그래피 장치
KOEVOETS ADRIANUS HENDRIK, VAN HAL PAULUS ALBERTUS, SEOANE DE LA CUESTA BEATRIZ
Year of Publication 17.08.2022
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Year of Publication 17.08.2022
Patent
COOLING APPARATUS AND METHOD OF USING THE SAME, AND LITHOGRAPHIC APPARATUS
ERIK JOHAN ARLEMARK, KATE NICOLAAS T, SANDER CATHARINA REINIER DERKS, SJOERD NICOLAAS LAMBERTUS DONDERS, KOEVOETS ADRIANUS HENDRIK, JIM VINCENT OVERKAMP, JANSSEN FRANCISCUS JOHANNES JOSEPH, LEVACIA LEON MARTIN, RAYMOND WILHELMUS LOUIS LAFARRE, JACOBUS CORNELIS GERARDUS VAN DER SANDEN, ENDENDIJK WILFRED EDWARD
Year of Publication 04.11.2021
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Year of Publication 04.11.2021
Patent
CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
NELSON MICHAEL LEO, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, KOEVOETS ADRIANUS HENDRIK, O'CONNOR GEOFFREY, CHIEDA MICHAEL ANDREW, UITTERDIJK TAMMO, LAFARRE RAYMOND WILHELMUS LOUIS
Year of Publication 11.11.2019
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Year of Publication 11.11.2019
Patent
냉각 장치 및 냉각 장치용 플라즈마-세정 스테이션
VAN DER SANDEN JACOBUS CORNELIS GERARDUS, NASALEVICH MAXIM ALEKSANDROVICH, NIKIPELOV ANDREY, KOEVOETS ADRIANUS HENDRIK, GROENEWOLD JAN, DE RAPPER WILLEM MICHIEL, PIJNENBURG JOHANNES ADRIANUS CORNELIS MARIA, DONDERS SJOERD NICOLAAS LAMBERTUS, LEROUX ALAIN LOUIS CLAUDE, DE MEIJERE CORNELIS ADRIANUS
Year of Publication 19.02.2020
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Year of Publication 19.02.2020
Patent
리소그래피 장치
COX HENDRIKUS HERMAN MARIE, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, OVERKAMP JIM VINCENT, DEN BOEF ARIE JEFFREY, KOEVOETS ADRIANUS HENDRIK, DE WIT PAUL CORNE HENRI, VAN DER MEULEN FRITS
Year of Publication 25.04.2019
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Year of Publication 25.04.2019
Patent
SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
ARLEMARK ERIK, KOEVOETS ADRIANUS, LAFARRE RAYMOND, LUIJTEN CARLO, NIENHUYS HAN KWANG, TEN KATE NICOLAAS
Year of Publication 26.08.2015
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Year of Publication 26.08.2015
Patent
METHOD FOR COMPENSATING AN EXPOSURE ERROR IN AN EXPOSURE PROCESS
CASTELIJNS HENRICUS JOZEF, LEVASIER LEON MARTIN, BECKERS MARCEL, BERENDSEN CHRISTIANUS WILHELMUS JOHANNES, GERAETS HUBERTUS ANTONIUS, TROMP SIEGFRIED ALEXANDER, KOEVOETS ADRIANUS HENDRIK, SCHAAP PETER, STREEFKERK BOB
Year of Publication 07.02.2017
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Year of Publication 07.02.2017
Patent
리소그래피 장치
LEVASIER LEON MARTIN, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, OVERKAMP JIM VINCENT, KOEVOETS ADRIANUS HENDRIK, DERKS SANDER CATHARINA REINIER, JANSSEN FRANCISCUS JOHANNES JOSEPH, DONDERS SJOERD NICOLAAS LAMBERTUS, ARLEMARK ERIK JOHAN, LAFARRE RAYMOND WILHELMUS LOUIS, ENDENDIJK WILFRED EDWARD, TEN KATE NICOLAAS
Year of Publication 26.12.2017
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Year of Publication 26.12.2017
Patent
리소그래피 장치
LIMPENS PATRICK WILLEM PAUL, DE VRIES GOSSE CHARLES, KOEVOETS ADRIANUS HENDRIK, DE HOOGH JOOST, VAN DER MEULEN FRITS, DE WIT PAUL CORNE HENRI, HOOGENDAM CHRISTIAAN ALEXANDER, VAN DER MEULEN STAN HENRICUS, LEROUX ALAIN LOUIS CLAUDE, LAFARRE RAYMOND WILHELMUS LOUIS, VALENTIN CHRISTIAAN LOUIS, COX HENDRIKUS HERMAN MARIE, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, OVERKAMP JIM VINCENT, HEMSCHOOTE DRIES VAAST PAUL, VAN DER SCHOOT HARMEN KLAAS, DERKS SANDER CATHARINA REINIER, GIJZEN RONALD CORNELIS GERARDUS, VLES DAVID FERDINAND, VAN BERKEL KOOS, CUIJPERS MARTINUS AGNES WILLEM, ARLEMARK ERIK JOHAN, WESTERHUIS EVERT AUKE RINZE
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
Patent
LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING A LITHOGRAPHIC APPARATUS
BERENDSEN CHRISTIANUS WILHELMUS JOHANNES, JEUNINK ANDRE BERNARDUS, OVERKAMP JIM VINCENT, TROMP SIEGFRIED ALEXANDER, KOEVOETS ADRIANUS HENDRIK, AUDENAERDT DANIEL ELZA ROELAND, CORTIE ROGIER HENDRIKUS MAGDALENA, VY VAN VUONG
Year of Publication 13.02.2017
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Year of Publication 13.02.2017
Patent
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, ANTONIUS FRANCISCUS JOHNNES DE GROOT, JOHANNES HENRICUS WILHELMUS JACOBS, VESTERAKEN JEAN STEVEN CHRISTIAN, LAMBERTUS DONDERS SJOERD NICOLAAS, MAARTEN VAN BEIJNUM, KOEVOETS ADRIANUS HENDRIK, JIM VINCENT OVERKAMP, RAYMOND WILHELMUS LOUIS LAFARRE, FIEN MENNO, CHRISTIAN ALEXANDER HOOGENDAM, HOUBEN MARTIJN
Year of Publication 04.11.2016
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Year of Publication 04.11.2016
Patent